3/26/2010	5:38:47 AM	Main Vac valve closed
3/26/2010	5:38:49 AM	Bypass valve closed
3/26/2010	5:39:04 AM	Main Vac valve opened
3/26/2010	5:39:05 AM	Bypass valve opened
3/26/2010	5:40:15 AM	Recipe started at 5:40 AM
3/26/2010	5:40:15 AM	Helium valve closed
3/26/2010	5:40:15 AM	BCl3 valve closed
3/26/2010	5:40:15 AM	PH3 valve closed
3/26/2010	5:40:15 AM	SiCl4 pre valve closed
3/26/2010	5:40:15 AM	SiCl4 post valve closed
3/26/2010	5:40:15 AM	Main Vac valve closed
3/26/2010	5:40:15 AM	Bypass valve closed
3/26/2010	5:40:15 AM	Bubbler valve closed
3/26/2010	5:40:15 AM	H2 valve opened
3/26/2010	5:40:15 AM	Helium MFC set to  0.000000
3/26/2010	5:40:15 AM	H2 MFC set to  500.000000
3/26/2010	5:40:15 AM	BCl3 MFC set to  0.000000
3/26/2010	5:40:15 AM	SiCl4 MFC set to  0.000000
3/26/2010	5:40:15 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	5:40:15 AM	Tube furnace set to 0
3/26/2010	5:41:36 AM	Helium valve closed
3/26/2010	5:41:36 AM	BCl3 valve closed
3/26/2010	5:41:36 AM	PH3 valve closed
3/26/2010	5:41:36 AM	SiCl4 pre valve closed
3/26/2010	5:41:36 AM	SiCl4 post valve closed
3/26/2010	5:41:36 AM	Main Vac valve closed
3/26/2010	5:41:36 AM	Bypass valve closed
3/26/2010	5:41:36 AM	H2 valve opened
3/26/2010	5:41:36 AM	Bubbler valve opened
3/26/2010	5:41:36 AM	Helium MFC set to  0.000000
3/26/2010	5:41:36 AM	H2 MFC set to  500.000000
3/26/2010	5:41:36 AM	BCl3 MFC set to  0.000000
3/26/2010	5:41:36 AM	SiCl4 MFC set to  0.000000
3/26/2010	5:41:36 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	5:41:36 AM	Tube furnace set to 0
3/26/2010	6:01:37 AM	Helium valve closed
3/26/2010	6:01:37 AM	BCl3 valve closed
3/26/2010	6:01:37 AM	PH3 valve closed
3/26/2010	6:01:37 AM	Main Vac valve closed
3/26/2010	6:01:37 AM	Bypass valve closed
3/26/2010	6:01:37 AM	H2 valve opened
3/26/2010	6:01:37 AM	SiCl4 pre valve opened
3/26/2010	6:01:37 AM	SiCl4 post valve opened
3/26/2010	6:01:37 AM	Bubbler valve opened
3/26/2010	6:01:37 AM	Helium MFC set to  0.000000
3/26/2010	6:01:37 AM	H2 MFC set to  500.000000
3/26/2010	6:01:37 AM	BCl3 MFC set to  0.000000
3/26/2010	6:01:37 AM	SiCl4 MFC set to  325.000000
3/26/2010	6:01:37 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	6:01:37 AM	Tube furnace set to 0
3/26/2010	6:21:37 AM	Helium valve closed
3/26/2010	6:21:37 AM	BCl3 valve closed
3/26/2010	6:21:37 AM	PH3 valve closed
3/26/2010	6:21:37 AM	SiCl4 pre valve closed
3/26/2010	6:21:37 AM	SiCl4 post valve closed
3/26/2010	6:21:37 AM	Main Vac valve closed
3/26/2010	6:21:37 AM	Bypass valve closed
3/26/2010	6:21:37 AM	H2 valve opened
3/26/2010	6:21:37 AM	Bubbler valve opened
3/26/2010	6:21:37 AM	Helium MFC set to  0.000000
3/26/2010	6:21:37 AM	H2 MFC set to  500.000000
3/26/2010	6:21:37 AM	BCl3 MFC set to  0.000000
3/26/2010	6:21:37 AM	SiCl4 MFC set to  0.000000
3/26/2010	6:21:37 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	6:21:37 AM	Tube furnace set to 0
3/26/2010	6:41:38 AM	H2 valve closed
3/26/2010	6:41:38 AM	BCl3 valve closed
3/26/2010	6:41:38 AM	PH3 valve closed
3/26/2010	6:41:38 AM	SiCl4 pre valve closed
3/26/2010	6:41:38 AM	SiCl4 post valve closed
3/26/2010	6:41:38 AM	Main Vac valve closed
3/26/2010	6:41:38 AM	Bypass valve closed
3/26/2010	6:41:38 AM	Helium valve opened
3/26/2010	6:41:38 AM	Bubbler valve opened
3/26/2010	6:41:38 AM	Helium MFC set to  500.000000
3/26/2010	6:41:38 AM	H2 MFC set to  0.000000
3/26/2010	6:41:38 AM	BCl3 MFC set to  0.000000
3/26/2010	6:41:38 AM	SiCl4 MFC set to  0.000000
3/26/2010	6:41:38 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	6:41:38 AM	Tube furnace set to 0
3/26/2010	6:42:18 AM	Run aborted at 6:42 AM
3/26/2010	6:42:18 AM	Helium valve closed
3/26/2010	6:42:18 AM	H2 valve closed
3/26/2010	6:42:18 AM	BCl3 valve closed
3/26/2010	6:42:18 AM	PH3 valve closed
3/26/2010	6:42:18 AM	SiCl4 pre valve closed
3/26/2010	6:42:18 AM	SiCl4 post valve closed
3/26/2010	6:42:18 AM	Bypass valve closed
3/26/2010	6:42:18 AM	Main Vac valve closed
3/26/2010	6:42:18 AM	Bubbler valve closed
3/26/2010	6:42:18 AM	Helium MFC set to  0.000000
3/26/2010	6:42:18 AM	H2 MFC set to  0.000000
3/26/2010	6:42:18 AM	BCl3 MFC set to  0.000000
3/26/2010	6:42:18 AM	SiCl4 MFC set to  0.000000
3/26/2010	6:42:18 AM	Tube furnace set to 0
3/26/2010	6:49:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/26/2010	6:49:55 AM	Recipe started at 6:49 AM
3/26/2010	6:49:55 AM	Helium valve closed
3/26/2010	6:49:55 AM	H2 valve closed
3/26/2010	6:49:55 AM	BCl3 valve closed
3/26/2010	6:49:55 AM	PH3 valve closed
3/26/2010	6:49:55 AM	SiCl4 pre valve closed
3/26/2010	6:49:55 AM	SiCl4 post valve closed
3/26/2010	6:49:55 AM	Main Vac valve closed
3/26/2010	6:49:55 AM	Bubbler valve closed
3/26/2010	6:49:55 AM	Bypass valve opened
3/26/2010	6:49:55 AM	Helium MFC set to  0.000000
3/26/2010	6:49:55 AM	H2 MFC set to  0.000000
3/26/2010	6:49:55 AM	BCl3 MFC set to  0.000000
3/26/2010	6:49:55 AM	SiCl4 MFC set to  0.000000
3/26/2010	6:49:55 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	6:49:55 AM	Tube furnace set to 0
3/26/2010	6:50:25 AM	Helium valve closed
3/26/2010	6:50:25 AM	H2 valve closed
3/26/2010	6:50:25 AM	BCl3 valve closed
3/26/2010	6:50:25 AM	PH3 valve closed
3/26/2010	6:50:25 AM	SiCl4 pre valve closed
3/26/2010	6:50:25 AM	SiCl4 post valve closed
3/26/2010	6:50:25 AM	Bubbler valve closed
3/26/2010	6:50:25 AM	Main Vac valve opened
3/26/2010	6:50:25 AM	Bypass valve opened
3/26/2010	6:50:25 AM	Helium MFC set to  0.000000
3/26/2010	6:50:25 AM	H2 MFC set to  0.000000
3/26/2010	6:50:25 AM	BCl3 MFC set to  0.000000
3/26/2010	6:50:25 AM	SiCl4 MFC set to  0.000000
3/26/2010	6:50:25 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	6:50:25 AM	Tube furnace set to 0
3/26/2010	6:50:26 AM	Run finished at 6:50 AM
3/26/2010	6:50:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/26/2010	6:59:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/26/2010	6:59:49 AM	Recipe started at 6:59 AM
3/26/2010	6:59:49 AM	H2 valve closed
3/26/2010	6:59:49 AM	BCl3 valve closed
3/26/2010	6:59:49 AM	PH3 valve closed
3/26/2010	6:59:49 AM	SiCl4 pre valve closed
3/26/2010	6:59:49 AM	SiCl4 post valve closed
3/26/2010	6:59:49 AM	Main Vac valve closed
3/26/2010	6:59:49 AM	Bypass valve closed
3/26/2010	6:59:49 AM	Bubbler valve closed
3/26/2010	6:59:49 AM	Helium valve opened
3/26/2010	6:59:49 AM	Helium MFC set to  500.000000
3/26/2010	6:59:49 AM	H2 MFC set to  0.000000
3/26/2010	6:59:49 AM	BCl3 MFC set to  0.000000
3/26/2010	6:59:49 AM	SiCl4 MFC set to  0.000000
3/26/2010	6:59:49 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	6:59:49 AM	Tube furnace set to 0
3/26/2010	7:01:10 AM	Helium valve closed
3/26/2010	7:01:10 AM	H2 valve closed
3/26/2010	7:01:10 AM	BCl3 valve closed
3/26/2010	7:01:10 AM	PH3 valve closed
3/26/2010	7:01:10 AM	SiCl4 pre valve closed
3/26/2010	7:01:10 AM	SiCl4 post valve closed
3/26/2010	7:01:10 AM	Main Vac valve closed
3/26/2010	7:01:10 AM	Bypass valve closed
3/26/2010	7:01:10 AM	Bubbler valve closed
3/26/2010	7:01:10 AM	Helium MFC set to  0.000000
3/26/2010	7:01:10 AM	H2 MFC set to  0.000000
3/26/2010	7:01:10 AM	BCl3 MFC set to  0.000000
3/26/2010	7:01:10 AM	SiCl4 MFC set to  0.000000
3/26/2010	7:01:10 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	7:01:10 AM	Tube furnace set to 0
3/26/2010	7:01:26 AM	Helium valve closed
3/26/2010	7:01:26 AM	H2 valve closed
3/26/2010	7:01:26 AM	BCl3 valve closed
3/26/2010	7:01:26 AM	PH3 valve closed
3/26/2010	7:01:26 AM	SiCl4 pre valve closed
3/26/2010	7:01:26 AM	SiCl4 post valve closed
3/26/2010	7:01:26 AM	Main Vac valve closed
3/26/2010	7:01:26 AM	Bubbler valve closed
3/26/2010	7:01:26 AM	Bypass valve opened
3/26/2010	7:01:26 AM	Helium MFC set to  0.000000
3/26/2010	7:01:26 AM	H2 MFC set to  0.000000
3/26/2010	7:01:26 AM	BCl3 MFC set to  0.000000
3/26/2010	7:01:26 AM	SiCl4 MFC set to  0.000000
3/26/2010	7:01:26 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	7:01:26 AM	Tube furnace set to 0
3/26/2010	7:01:48 AM	Helium valve closed
3/26/2010	7:01:48 AM	H2 valve closed
3/26/2010	7:01:48 AM	BCl3 valve closed
3/26/2010	7:01:48 AM	PH3 valve closed
3/26/2010	7:01:48 AM	SiCl4 pre valve closed
3/26/2010	7:01:48 AM	SiCl4 post valve closed
3/26/2010	7:01:48 AM	Bubbler valve closed
3/26/2010	7:01:48 AM	Main Vac valve opened
3/26/2010	7:01:48 AM	Bypass valve opened
3/26/2010	7:01:48 AM	Helium MFC set to  0.000000
3/26/2010	7:01:48 AM	H2 MFC set to  0.000000
3/26/2010	7:01:48 AM	BCl3 MFC set to  0.000000
3/26/2010	7:01:48 AM	SiCl4 MFC set to  0.000000
3/26/2010	7:01:48 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	7:01:48 AM	Tube furnace set to 0
3/26/2010	7:06:48 AM	H2 valve closed
3/26/2010	7:06:48 AM	BCl3 valve closed
3/26/2010	7:06:48 AM	PH3 valve closed
3/26/2010	7:06:48 AM	SiCl4 pre valve closed
3/26/2010	7:06:48 AM	SiCl4 post valve closed
3/26/2010	7:06:48 AM	Main Vac valve closed
3/26/2010	7:06:48 AM	Bypass valve closed
3/26/2010	7:06:48 AM	Bubbler valve closed
3/26/2010	7:06:48 AM	Helium valve opened
3/26/2010	7:06:48 AM	Helium MFC set to  500.000000
3/26/2010	7:06:48 AM	H2 MFC set to  0.000000
3/26/2010	7:06:48 AM	BCl3 MFC set to  0.000000
3/26/2010	7:06:48 AM	SiCl4 MFC set to  0.000000
3/26/2010	7:06:48 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	7:06:48 AM	Tube furnace set to 0
3/26/2010	7:08:09 AM	Helium valve closed
3/26/2010	7:08:09 AM	H2 valve closed
3/26/2010	7:08:09 AM	BCl3 valve closed
3/26/2010	7:08:09 AM	PH3 valve closed
3/26/2010	7:08:09 AM	SiCl4 pre valve closed
3/26/2010	7:08:09 AM	SiCl4 post valve closed
3/26/2010	7:08:09 AM	Main Vac valve closed
3/26/2010	7:08:09 AM	Bypass valve closed
3/26/2010	7:08:09 AM	Bubbler valve closed
3/26/2010	7:08:09 AM	Helium MFC set to  0.000000
3/26/2010	7:08:09 AM	H2 MFC set to  0.000000
3/26/2010	7:08:09 AM	BCl3 MFC set to  0.000000
3/26/2010	7:08:09 AM	SiCl4 MFC set to  0.000000
3/26/2010	7:08:09 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	7:08:09 AM	Tube furnace set to 0
3/26/2010	7:08:25 AM	Helium valve closed
3/26/2010	7:08:25 AM	H2 valve closed
3/26/2010	7:08:25 AM	BCl3 valve closed
3/26/2010	7:08:25 AM	PH3 valve closed
3/26/2010	7:08:25 AM	SiCl4 pre valve closed
3/26/2010	7:08:25 AM	SiCl4 post valve closed
3/26/2010	7:08:25 AM	Main Vac valve closed
3/26/2010	7:08:25 AM	Bubbler valve closed
3/26/2010	7:08:25 AM	Bypass valve opened
3/26/2010	7:08:25 AM	Helium MFC set to  0.000000
3/26/2010	7:08:25 AM	H2 MFC set to  0.000000
3/26/2010	7:08:25 AM	BCl3 MFC set to  0.000000
3/26/2010	7:08:25 AM	SiCl4 MFC set to  0.000000
3/26/2010	7:08:25 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	7:08:25 AM	Tube furnace set to 0
3/26/2010	7:08:47 AM	Helium valve closed
3/26/2010	7:08:47 AM	H2 valve closed
3/26/2010	7:08:47 AM	BCl3 valve closed
3/26/2010	7:08:47 AM	PH3 valve closed
3/26/2010	7:08:47 AM	SiCl4 pre valve closed
3/26/2010	7:08:47 AM	SiCl4 post valve closed
3/26/2010	7:08:47 AM	Bubbler valve closed
3/26/2010	7:08:47 AM	Main Vac valve opened
3/26/2010	7:08:47 AM	Bypass valve opened
3/26/2010	7:08:47 AM	Helium MFC set to  0.000000
3/26/2010	7:08:47 AM	H2 MFC set to  0.000000
3/26/2010	7:08:47 AM	BCl3 MFC set to  0.000000
3/26/2010	7:08:47 AM	SiCl4 MFC set to  0.000000
3/26/2010	7:08:47 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	7:08:47 AM	Tube furnace set to 0
3/26/2010	7:13:47 AM	H2 valve closed
3/26/2010	7:13:47 AM	BCl3 valve closed
3/26/2010	7:13:47 AM	PH3 valve closed
3/26/2010	7:13:47 AM	SiCl4 pre valve closed
3/26/2010	7:13:47 AM	SiCl4 post valve closed
3/26/2010	7:13:47 AM	Main Vac valve closed
3/26/2010	7:13:47 AM	Bypass valve closed
3/26/2010	7:13:47 AM	Bubbler valve closed
3/26/2010	7:13:47 AM	Helium valve opened
3/26/2010	7:13:47 AM	Helium MFC set to  500.000000
3/26/2010	7:13:47 AM	H2 MFC set to  0.000000
3/26/2010	7:13:47 AM	BCl3 MFC set to  0.000000
3/26/2010	7:13:47 AM	SiCl4 MFC set to  0.000000
3/26/2010	7:13:47 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	7:13:47 AM	Tube furnace set to 0
3/26/2010	7:15:09 AM	Helium valve closed
3/26/2010	7:15:09 AM	H2 valve closed
3/26/2010	7:15:09 AM	BCl3 valve closed
3/26/2010	7:15:09 AM	PH3 valve closed
3/26/2010	7:15:09 AM	SiCl4 pre valve closed
3/26/2010	7:15:09 AM	SiCl4 post valve closed
3/26/2010	7:15:09 AM	Main Vac valve closed
3/26/2010	7:15:09 AM	Bypass valve closed
3/26/2010	7:15:09 AM	Bubbler valve closed
3/26/2010	7:15:09 AM	Helium MFC set to  0.000000
3/26/2010	7:15:09 AM	H2 MFC set to  0.000000
3/26/2010	7:15:09 AM	BCl3 MFC set to  0.000000
3/26/2010	7:15:09 AM	SiCl4 MFC set to  0.000000
3/26/2010	7:15:09 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	7:15:09 AM	Tube furnace set to 0
3/26/2010	7:15:16 AM	Helium valve closed
3/26/2010	7:15:16 AM	H2 valve closed
3/26/2010	7:15:16 AM	BCl3 valve closed
3/26/2010	7:15:16 AM	PH3 valve closed
3/26/2010	7:15:16 AM	SiCl4 pre valve closed
3/26/2010	7:15:16 AM	SiCl4 post valve closed
3/26/2010	7:15:16 AM	Main Vac valve closed
3/26/2010	7:15:16 AM	Bubbler valve closed
3/26/2010	7:15:16 AM	Bypass valve opened
3/26/2010	7:15:16 AM	Helium MFC set to  0.000000
3/26/2010	7:15:16 AM	H2 MFC set to  0.000000
3/26/2010	7:15:16 AM	BCl3 MFC set to  0.000000
3/26/2010	7:15:16 AM	SiCl4 MFC set to  0.000000
3/26/2010	7:15:16 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	7:15:16 AM	Tube furnace set to 0
3/26/2010	7:15:38 AM	Helium valve closed
3/26/2010	7:15:38 AM	H2 valve closed
3/26/2010	7:15:38 AM	BCl3 valve closed
3/26/2010	7:15:38 AM	PH3 valve closed
3/26/2010	7:15:38 AM	SiCl4 pre valve closed
3/26/2010	7:15:38 AM	SiCl4 post valve closed
3/26/2010	7:15:38 AM	Bubbler valve closed
3/26/2010	7:15:38 AM	Main Vac valve opened
3/26/2010	7:15:38 AM	Bypass valve opened
3/26/2010	7:15:38 AM	Helium MFC set to  0.000000
3/26/2010	7:15:38 AM	H2 MFC set to  0.000000
3/26/2010	7:15:38 AM	BCl3 MFC set to  0.000000
3/26/2010	7:15:38 AM	SiCl4 MFC set to  0.000000
3/26/2010	7:15:38 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	7:15:38 AM	Tube furnace set to 0
3/26/2010	7:16:06 AM	Helium valve closed
3/26/2010	7:16:06 AM	H2 valve closed
3/26/2010	7:16:06 AM	BCl3 valve closed
3/26/2010	7:16:06 AM	PH3 valve closed
3/26/2010	7:16:06 AM	SiCl4 pre valve closed
3/26/2010	7:16:06 AM	SiCl4 post valve closed
3/26/2010	7:16:07 AM	Bubbler valve closed
3/26/2010	7:16:07 AM	Main Vac valve opened
3/26/2010	7:16:07 AM	Bypass valve opened
3/26/2010	7:16:07 AM	Helium MFC set to  0.000000
3/26/2010	7:16:07 AM	H2 MFC set to  0.000000
3/26/2010	7:16:07 AM	BCl3 MFC set to  0.000000
3/26/2010	7:16:07 AM	SiCl4 MFC set to  0.000000
3/26/2010	7:16:07 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	7:16:07 AM	Tube furnace set to 0
3/26/2010	7:16:08 AM	Run finished at 7:16 AM
3/26/2010	7:16:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/26/2010	7:16:39 AM	Main Vac valve closed
3/26/2010	7:16:40 AM	Bypass valve closed
3/26/2010	7:16:55 AM	Main Vac valve opened
3/26/2010	7:16:55 AM	Bypass valve opened
3/26/2010	7:17:36 AM	Recipe started at 7:17 AM
3/26/2010	7:17:36 AM	Helium valve closed
3/26/2010	7:17:36 AM	BCl3 valve closed
3/26/2010	7:17:36 AM	PH3 valve closed
3/26/2010	7:17:36 AM	SiCl4 pre valve closed
3/26/2010	7:17:36 AM	SiCl4 post valve closed
3/26/2010	7:17:36 AM	Main Vac valve closed
3/26/2010	7:17:36 AM	Bypass valve closed
3/26/2010	7:17:36 AM	Bubbler valve closed
3/26/2010	7:17:36 AM	H2 valve opened
3/26/2010	7:17:36 AM	Helium MFC set to  0.000000
3/26/2010	7:17:36 AM	H2 MFC set to  500.000000
3/26/2010	7:17:36 AM	BCl3 MFC set to  0.000000
3/26/2010	7:17:36 AM	SiCl4 MFC set to  0.000000
3/26/2010	7:17:36 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	7:17:36 AM	Tube furnace set to 0
3/26/2010	7:18:56 AM	Helium valve closed
3/26/2010	7:18:56 AM	BCl3 valve closed
3/26/2010	7:18:56 AM	PH3 valve closed
3/26/2010	7:18:56 AM	SiCl4 pre valve closed
3/26/2010	7:18:56 AM	SiCl4 post valve closed
3/26/2010	7:18:56 AM	Main Vac valve closed
3/26/2010	7:18:56 AM	Bypass valve closed
3/26/2010	7:18:56 AM	H2 valve opened
3/26/2010	7:18:56 AM	Bubbler valve opened
3/26/2010	7:18:56 AM	Helium MFC set to  0.000000
3/26/2010	7:18:56 AM	H2 MFC set to  500.000000
3/26/2010	7:18:56 AM	BCl3 MFC set to  0.000000
3/26/2010	7:18:56 AM	SiCl4 MFC set to  0.000000
3/26/2010	7:18:56 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	7:18:56 AM	Tube furnace set to 0
3/26/2010	7:38:56 AM	Helium valve closed
3/26/2010	7:38:56 AM	BCl3 valve closed
3/26/2010	7:38:56 AM	PH3 valve closed
3/26/2010	7:38:56 AM	Main Vac valve closed
3/26/2010	7:38:56 AM	Bypass valve closed
3/26/2010	7:38:56 AM	H2 valve opened
3/26/2010	7:38:56 AM	SiCl4 pre valve opened
3/26/2010	7:38:56 AM	SiCl4 post valve opened
3/26/2010	7:38:56 AM	Bubbler valve opened
3/26/2010	7:38:56 AM	Helium MFC set to  0.000000
3/26/2010	7:38:56 AM	H2 MFC set to  500.000000
3/26/2010	7:38:56 AM	BCl3 MFC set to  0.000000
3/26/2010	7:38:56 AM	SiCl4 MFC set to  325.000000
3/26/2010	7:38:56 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	7:38:56 AM	Tube furnace set to 0
3/26/2010	7:58:57 AM	Helium valve closed
3/26/2010	7:58:57 AM	BCl3 valve closed
3/26/2010	7:58:57 AM	PH3 valve closed
3/26/2010	7:58:57 AM	SiCl4 pre valve closed
3/26/2010	7:58:57 AM	SiCl4 post valve closed
3/26/2010	7:58:57 AM	Main Vac valve closed
3/26/2010	7:58:57 AM	Bypass valve closed
3/26/2010	7:58:57 AM	H2 valve opened
3/26/2010	7:58:57 AM	Bubbler valve opened
3/26/2010	7:58:57 AM	Helium MFC set to  0.000000
3/26/2010	7:58:57 AM	H2 MFC set to  500.000000
3/26/2010	7:58:57 AM	BCl3 MFC set to  0.000000
3/26/2010	7:58:57 AM	SiCl4 MFC set to  0.000000
3/26/2010	7:58:57 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	7:58:57 AM	Tube furnace set to 0
3/26/2010	8:18:57 AM	H2 valve closed
3/26/2010	8:18:57 AM	BCl3 valve closed
3/26/2010	8:18:57 AM	PH3 valve closed
3/26/2010	8:18:57 AM	SiCl4 pre valve closed
3/26/2010	8:18:57 AM	SiCl4 post valve closed
3/26/2010	8:18:57 AM	Main Vac valve closed
3/26/2010	8:18:57 AM	Bypass valve closed
3/26/2010	8:18:57 AM	Helium valve opened
3/26/2010	8:18:57 AM	Bubbler valve opened
3/26/2010	8:18:57 AM	Helium MFC set to  500.000000
3/26/2010	8:18:57 AM	H2 MFC set to  0.000000
3/26/2010	8:18:57 AM	BCl3 MFC set to  0.000000
3/26/2010	8:18:57 AM	SiCl4 MFC set to  0.000000
3/26/2010	8:18:57 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	8:18:57 AM	Tube furnace set to 0
3/26/2010	8:24:15 AM	Run aborted at 8:24 AM
3/26/2010	8:24:15 AM	Helium valve closed
3/26/2010	8:24:15 AM	H2 valve closed
3/26/2010	8:24:15 AM	BCl3 valve closed
3/26/2010	8:24:15 AM	PH3 valve closed
3/26/2010	8:24:15 AM	SiCl4 pre valve closed
3/26/2010	8:24:15 AM	SiCl4 post valve closed
3/26/2010	8:24:15 AM	Bypass valve closed
3/26/2010	8:24:15 AM	Main Vac valve closed
3/26/2010	8:24:15 AM	Bubbler valve closed
3/26/2010	8:24:15 AM	Helium MFC set to  0.000000
3/26/2010	8:24:15 AM	H2 MFC set to  0.000000
3/26/2010	8:24:15 AM	BCl3 MFC set to  0.000000
3/26/2010	8:24:15 AM	SiCl4 MFC set to  0.000000
3/26/2010	8:24:15 AM	Tube furnace set to 0
3/26/2010	8:30:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/26/2010	8:30:03 AM	Recipe started at 8:30 AM
3/26/2010	8:30:03 AM	Helium valve closed
3/26/2010	8:30:03 AM	H2 valve closed
3/26/2010	8:30:03 AM	BCl3 valve closed
3/26/2010	8:30:03 AM	PH3 valve closed
3/26/2010	8:30:03 AM	SiCl4 pre valve closed
3/26/2010	8:30:03 AM	SiCl4 post valve closed
3/26/2010	8:30:03 AM	Main Vac valve closed
3/26/2010	8:30:03 AM	Bubbler valve closed
3/26/2010	8:30:03 AM	Bypass valve opened
3/26/2010	8:30:03 AM	Helium MFC set to  0.000000
3/26/2010	8:30:03 AM	H2 MFC set to  0.000000
3/26/2010	8:30:03 AM	BCl3 MFC set to  0.000000
3/26/2010	8:30:03 AM	SiCl4 MFC set to  0.000000
3/26/2010	8:30:03 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	8:30:03 AM	Tube furnace set to 0
3/26/2010	8:30:35 AM	Helium valve closed
3/26/2010	8:30:35 AM	H2 valve closed
3/26/2010	8:30:35 AM	BCl3 valve closed
3/26/2010	8:30:35 AM	PH3 valve closed
3/26/2010	8:30:35 AM	SiCl4 pre valve closed
3/26/2010	8:30:35 AM	SiCl4 post valve closed
3/26/2010	8:30:35 AM	Bubbler valve closed
3/26/2010	8:30:35 AM	Main Vac valve opened
3/26/2010	8:30:35 AM	Bypass valve opened
3/26/2010	8:30:35 AM	Helium MFC set to  0.000000
3/26/2010	8:30:35 AM	H2 MFC set to  0.000000
3/26/2010	8:30:35 AM	BCl3 MFC set to  0.000000
3/26/2010	8:30:35 AM	SiCl4 MFC set to  0.000000
3/26/2010	8:30:35 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	8:30:35 AM	Tube furnace set to 0
3/26/2010	8:30:35 AM	Run finished at 8:30 AM
3/26/2010	8:30:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/26/2010	8:36:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/26/2010	8:36:41 AM	Recipe started at 8:36 AM
3/26/2010	8:36:41 AM	H2 valve closed
3/26/2010	8:36:41 AM	BCl3 valve closed
3/26/2010	8:36:41 AM	PH3 valve closed
3/26/2010	8:36:41 AM	SiCl4 pre valve closed
3/26/2010	8:36:41 AM	SiCl4 post valve closed
3/26/2010	8:36:41 AM	Main Vac valve closed
3/26/2010	8:36:41 AM	Bypass valve closed
3/26/2010	8:36:41 AM	Bubbler valve closed
3/26/2010	8:36:41 AM	Helium valve opened
3/26/2010	8:36:41 AM	Helium MFC set to  500.000000
3/26/2010	8:36:41 AM	H2 MFC set to  0.000000
3/26/2010	8:36:41 AM	BCl3 MFC set to  0.000000
3/26/2010	8:36:41 AM	SiCl4 MFC set to  0.000000
3/26/2010	8:36:41 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	8:36:41 AM	Tube furnace set to 0
3/26/2010	8:38:02 AM	Helium valve closed
3/26/2010	8:38:02 AM	H2 valve closed
3/26/2010	8:38:02 AM	BCl3 valve closed
3/26/2010	8:38:02 AM	PH3 valve closed
3/26/2010	8:38:02 AM	SiCl4 pre valve closed
3/26/2010	8:38:02 AM	SiCl4 post valve closed
3/26/2010	8:38:02 AM	Main Vac valve closed
3/26/2010	8:38:02 AM	Bypass valve closed
3/26/2010	8:38:02 AM	Bubbler valve closed
3/26/2010	8:38:02 AM	Helium MFC set to  0.000000
3/26/2010	8:38:02 AM	H2 MFC set to  0.000000
3/26/2010	8:38:02 AM	BCl3 MFC set to  0.000000
3/26/2010	8:38:02 AM	SiCl4 MFC set to  0.000000
3/26/2010	8:38:02 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	8:38:02 AM	Tube furnace set to 0
3/26/2010	8:38:17 AM	Helium valve closed
3/26/2010	8:38:17 AM	H2 valve closed
3/26/2010	8:38:17 AM	BCl3 valve closed
3/26/2010	8:38:17 AM	PH3 valve closed
3/26/2010	8:38:17 AM	SiCl4 pre valve closed
3/26/2010	8:38:17 AM	SiCl4 post valve closed
3/26/2010	8:38:17 AM	Main Vac valve closed
3/26/2010	8:38:17 AM	Bubbler valve closed
3/26/2010	8:38:17 AM	Bypass valve opened
3/26/2010	8:38:17 AM	Helium MFC set to  0.000000
3/26/2010	8:38:17 AM	H2 MFC set to  0.000000
3/26/2010	8:38:17 AM	BCl3 MFC set to  0.000000
3/26/2010	8:38:17 AM	SiCl4 MFC set to  0.000000
3/26/2010	8:38:17 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	8:38:17 AM	Tube furnace set to 0
3/26/2010	8:38:40 AM	Helium valve closed
3/26/2010	8:38:40 AM	H2 valve closed
3/26/2010	8:38:40 AM	BCl3 valve closed
3/26/2010	8:38:40 AM	PH3 valve closed
3/26/2010	8:38:40 AM	SiCl4 pre valve closed
3/26/2010	8:38:40 AM	SiCl4 post valve closed
3/26/2010	8:38:40 AM	Bubbler valve closed
3/26/2010	8:38:40 AM	Main Vac valve opened
3/26/2010	8:38:40 AM	Bypass valve opened
3/26/2010	8:38:40 AM	Helium MFC set to  0.000000
3/26/2010	8:38:40 AM	H2 MFC set to  0.000000
3/26/2010	8:38:40 AM	BCl3 MFC set to  0.000000
3/26/2010	8:38:40 AM	SiCl4 MFC set to  0.000000
3/26/2010	8:38:40 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	8:38:40 AM	Tube furnace set to 0
3/26/2010	8:43:40 AM	H2 valve closed
3/26/2010	8:43:40 AM	BCl3 valve closed
3/26/2010	8:43:40 AM	PH3 valve closed
3/26/2010	8:43:40 AM	SiCl4 pre valve closed
3/26/2010	8:43:40 AM	SiCl4 post valve closed
3/26/2010	8:43:40 AM	Main Vac valve closed
3/26/2010	8:43:40 AM	Bypass valve closed
3/26/2010	8:43:40 AM	Bubbler valve closed
3/26/2010	8:43:40 AM	Helium valve opened
3/26/2010	8:43:40 AM	Helium MFC set to  500.000000
3/26/2010	8:43:40 AM	H2 MFC set to  0.000000
3/26/2010	8:43:40 AM	BCl3 MFC set to  0.000000
3/26/2010	8:43:40 AM	SiCl4 MFC set to  0.000000
3/26/2010	8:43:40 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	8:43:40 AM	Tube furnace set to 0
3/26/2010	8:45:01 AM	Helium valve closed
3/26/2010	8:45:01 AM	H2 valve closed
3/26/2010	8:45:01 AM	BCl3 valve closed
3/26/2010	8:45:01 AM	PH3 valve closed
3/26/2010	8:45:01 AM	SiCl4 pre valve closed
3/26/2010	8:45:01 AM	SiCl4 post valve closed
3/26/2010	8:45:01 AM	Main Vac valve closed
3/26/2010	8:45:01 AM	Bypass valve closed
3/26/2010	8:45:01 AM	Bubbler valve closed
3/26/2010	8:45:01 AM	Helium MFC set to  0.000000
3/26/2010	8:45:01 AM	H2 MFC set to  0.000000
3/26/2010	8:45:01 AM	BCl3 MFC set to  0.000000
3/26/2010	8:45:01 AM	SiCl4 MFC set to  0.000000
3/26/2010	8:45:01 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	8:45:01 AM	Tube furnace set to 0
3/26/2010	8:45:04 AM	Helium valve closed
3/26/2010	8:45:04 AM	H2 valve closed
3/26/2010	8:45:04 AM	BCl3 valve closed
3/26/2010	8:45:04 AM	PH3 valve closed
3/26/2010	8:45:04 AM	SiCl4 pre valve closed
3/26/2010	8:45:04 AM	SiCl4 post valve closed
3/26/2010	8:45:04 AM	Main Vac valve closed
3/26/2010	8:45:04 AM	Bubbler valve closed
3/26/2010	8:45:04 AM	Bypass valve opened
3/26/2010	8:45:04 AM	Helium MFC set to  0.000000
3/26/2010	8:45:04 AM	H2 MFC set to  0.000000
3/26/2010	8:45:04 AM	BCl3 MFC set to  0.000000
3/26/2010	8:45:04 AM	SiCl4 MFC set to  0.000000
3/26/2010	8:45:04 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	8:45:04 AM	Tube furnace set to 0
3/26/2010	8:45:26 AM	Helium valve closed
3/26/2010	8:45:26 AM	H2 valve closed
3/26/2010	8:45:26 AM	BCl3 valve closed
3/26/2010	8:45:26 AM	PH3 valve closed
3/26/2010	8:45:26 AM	SiCl4 pre valve closed
3/26/2010	8:45:26 AM	SiCl4 post valve closed
3/26/2010	8:45:26 AM	Bubbler valve closed
3/26/2010	8:45:26 AM	Main Vac valve opened
3/26/2010	8:45:26 AM	Bypass valve opened
3/26/2010	8:45:26 AM	Helium MFC set to  0.000000
3/26/2010	8:45:26 AM	H2 MFC set to  0.000000
3/26/2010	8:45:26 AM	BCl3 MFC set to  0.000000
3/26/2010	8:45:26 AM	SiCl4 MFC set to  0.000000
3/26/2010	8:45:26 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	8:45:26 AM	Tube furnace set to 0
3/26/2010	8:50:26 AM	H2 valve closed
3/26/2010	8:50:26 AM	BCl3 valve closed
3/26/2010	8:50:26 AM	PH3 valve closed
3/26/2010	8:50:26 AM	SiCl4 pre valve closed
3/26/2010	8:50:26 AM	SiCl4 post valve closed
3/26/2010	8:50:26 AM	Main Vac valve closed
3/26/2010	8:50:26 AM	Bypass valve closed
3/26/2010	8:50:26 AM	Bubbler valve closed
3/26/2010	8:50:26 AM	Helium valve opened
3/26/2010	8:50:26 AM	Helium MFC set to  500.000000
3/26/2010	8:50:26 AM	H2 MFC set to  0.000000
3/26/2010	8:50:26 AM	BCl3 MFC set to  0.000000
3/26/2010	8:50:26 AM	SiCl4 MFC set to  0.000000
3/26/2010	8:50:26 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	8:50:26 AM	Tube furnace set to 0
3/26/2010	8:51:48 AM	Helium valve closed
3/26/2010	8:51:48 AM	H2 valve closed
3/26/2010	8:51:48 AM	BCl3 valve closed
3/26/2010	8:51:48 AM	PH3 valve closed
3/26/2010	8:51:48 AM	SiCl4 pre valve closed
3/26/2010	8:51:48 AM	SiCl4 post valve closed
3/26/2010	8:51:48 AM	Main Vac valve closed
3/26/2010	8:51:48 AM	Bypass valve closed
3/26/2010	8:51:48 AM	Bubbler valve closed
3/26/2010	8:51:48 AM	Helium MFC set to  0.000000
3/26/2010	8:51:48 AM	H2 MFC set to  0.000000
3/26/2010	8:51:48 AM	BCl3 MFC set to  0.000000
3/26/2010	8:51:48 AM	SiCl4 MFC set to  0.000000
3/26/2010	8:51:48 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	8:51:48 AM	Tube furnace set to 0
3/26/2010	8:51:56 AM	Helium valve closed
3/26/2010	8:51:56 AM	H2 valve closed
3/26/2010	8:51:56 AM	BCl3 valve closed
3/26/2010	8:51:56 AM	PH3 valve closed
3/26/2010	8:51:56 AM	SiCl4 pre valve closed
3/26/2010	8:51:56 AM	SiCl4 post valve closed
3/26/2010	8:51:56 AM	Main Vac valve closed
3/26/2010	8:51:56 AM	Bubbler valve closed
3/26/2010	8:51:56 AM	Bypass valve opened
3/26/2010	8:51:56 AM	Helium MFC set to  0.000000
3/26/2010	8:51:56 AM	H2 MFC set to  0.000000
3/26/2010	8:51:56 AM	BCl3 MFC set to  0.000000
3/26/2010	8:51:56 AM	SiCl4 MFC set to  0.000000
3/26/2010	8:51:56 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	8:51:56 AM	Tube furnace set to 0
3/26/2010	8:52:19 AM	Helium valve closed
3/26/2010	8:52:19 AM	H2 valve closed
3/26/2010	8:52:19 AM	BCl3 valve closed
3/26/2010	8:52:19 AM	PH3 valve closed
3/26/2010	8:52:19 AM	SiCl4 pre valve closed
3/26/2010	8:52:19 AM	SiCl4 post valve closed
3/26/2010	8:52:19 AM	Bubbler valve closed
3/26/2010	8:52:19 AM	Main Vac valve opened
3/26/2010	8:52:19 AM	Bypass valve opened
3/26/2010	8:52:19 AM	Helium MFC set to  0.000000
3/26/2010	8:52:19 AM	H2 MFC set to  0.000000
3/26/2010	8:52:19 AM	BCl3 MFC set to  0.000000
3/26/2010	8:52:19 AM	SiCl4 MFC set to  0.000000
3/26/2010	8:52:19 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	8:52:19 AM	Tube furnace set to 0
3/26/2010	8:57:19 AM	Helium valve closed
3/26/2010	8:57:19 AM	H2 valve closed
3/26/2010	8:57:19 AM	BCl3 valve closed
3/26/2010	8:57:19 AM	PH3 valve closed
3/26/2010	8:57:19 AM	SiCl4 pre valve closed
3/26/2010	8:57:19 AM	SiCl4 post valve closed
3/26/2010	8:57:19 AM	Bubbler valve closed
3/26/2010	8:57:19 AM	Main Vac valve opened
3/26/2010	8:57:19 AM	Bypass valve opened
3/26/2010	8:57:19 AM	Helium MFC set to  0.000000
3/26/2010	8:57:19 AM	H2 MFC set to  0.000000
3/26/2010	8:57:19 AM	BCl3 MFC set to  0.000000
3/26/2010	8:57:19 AM	SiCl4 MFC set to  0.000000
3/26/2010	8:57:19 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	8:57:19 AM	Tube furnace set to 0
3/26/2010	8:57:21 AM	Run finished at 8:57 AM
3/26/2010	8:57:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/26/2010	9:07:57 AM	Recipe started at 9:07 AM
3/26/2010	9:07:57 AM	Helium valve closed
3/26/2010	9:07:57 AM	BCl3 valve closed
3/26/2010	9:07:57 AM	PH3 valve closed
3/26/2010	9:07:57 AM	SiCl4 pre valve closed
3/26/2010	9:07:57 AM	SiCl4 post valve closed
3/26/2010	9:07:57 AM	Main Vac valve closed
3/26/2010	9:07:57 AM	Bypass valve closed
3/26/2010	9:07:57 AM	Bubbler valve closed
3/26/2010	9:07:57 AM	H2 valve opened
3/26/2010	9:07:57 AM	Helium MFC set to  0.000000
3/26/2010	9:07:57 AM	H2 MFC set to  500.000000
3/26/2010	9:07:57 AM	BCl3 MFC set to  0.000000
3/26/2010	9:07:57 AM	SiCl4 MFC set to  0.000000
3/26/2010	9:07:57 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	9:07:57 AM	Tube furnace set to 0
3/26/2010	9:09:17 AM	Helium valve closed
3/26/2010	9:09:17 AM	BCl3 valve closed
3/26/2010	9:09:17 AM	PH3 valve closed
3/26/2010	9:09:17 AM	SiCl4 pre valve closed
3/26/2010	9:09:17 AM	SiCl4 post valve closed
3/26/2010	9:09:17 AM	Main Vac valve closed
3/26/2010	9:09:17 AM	Bypass valve closed
3/26/2010	9:09:17 AM	H2 valve opened
3/26/2010	9:09:17 AM	Bubbler valve opened
3/26/2010	9:09:17 AM	Helium MFC set to  0.000000
3/26/2010	9:09:17 AM	H2 MFC set to  500.000000
3/26/2010	9:09:17 AM	BCl3 MFC set to  0.000000
3/26/2010	9:09:17 AM	SiCl4 MFC set to  0.000000
3/26/2010	9:09:17 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	9:09:17 AM	Tube furnace set to 0
3/26/2010	9:29:18 AM	Helium valve closed
3/26/2010	9:29:18 AM	BCl3 valve closed
3/26/2010	9:29:18 AM	PH3 valve closed
3/26/2010	9:29:18 AM	Main Vac valve closed
3/26/2010	9:29:18 AM	Bypass valve closed
3/26/2010	9:29:18 AM	H2 valve opened
3/26/2010	9:29:18 AM	SiCl4 pre valve opened
3/26/2010	9:29:18 AM	SiCl4 post valve opened
3/26/2010	9:29:18 AM	Bubbler valve opened
3/26/2010	9:29:18 AM	Helium MFC set to  0.000000
3/26/2010	9:29:18 AM	H2 MFC set to  500.000000
3/26/2010	9:29:18 AM	BCl3 MFC set to  0.000000
3/26/2010	9:29:18 AM	SiCl4 MFC set to  325.000000
3/26/2010	9:29:18 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	9:29:18 AM	Tube furnace set to 0
3/26/2010	9:49:18 AM	Helium valve closed
3/26/2010	9:49:18 AM	BCl3 valve closed
3/26/2010	9:49:18 AM	PH3 valve closed
3/26/2010	9:49:18 AM	SiCl4 pre valve closed
3/26/2010	9:49:18 AM	SiCl4 post valve closed
3/26/2010	9:49:18 AM	Main Vac valve closed
3/26/2010	9:49:18 AM	Bypass valve closed
3/26/2010	9:49:18 AM	H2 valve opened
3/26/2010	9:49:18 AM	Bubbler valve opened
3/26/2010	9:49:18 AM	Helium MFC set to  0.000000
3/26/2010	9:49:18 AM	H2 MFC set to  500.000000
3/26/2010	9:49:18 AM	BCl3 MFC set to  0.000000
3/26/2010	9:49:18 AM	SiCl4 MFC set to  0.000000
3/26/2010	9:49:18 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	9:49:18 AM	Tube furnace set to 0
3/26/2010	10:09:18 AM	H2 valve closed
3/26/2010	10:09:18 AM	BCl3 valve closed
3/26/2010	10:09:18 AM	PH3 valve closed
3/26/2010	10:09:18 AM	SiCl4 pre valve closed
3/26/2010	10:09:18 AM	SiCl4 post valve closed
3/26/2010	10:09:18 AM	Main Vac valve closed
3/26/2010	10:09:18 AM	Bypass valve closed
3/26/2010	10:09:18 AM	Helium valve opened
3/26/2010	10:09:18 AM	Bubbler valve opened
3/26/2010	10:09:18 AM	Helium MFC set to  500.000000
3/26/2010	10:09:18 AM	H2 MFC set to  0.000000
3/26/2010	10:09:18 AM	BCl3 MFC set to  0.000000
3/26/2010	10:09:18 AM	SiCl4 MFC set to  0.000000
3/26/2010	10:09:18 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	10:09:18 AM	Tube furnace set to 0
3/26/2010	10:19:33 AM	Run aborted at 10:19 AM
3/26/2010	10:19:33 AM	Helium valve closed
3/26/2010	10:19:33 AM	H2 valve closed
3/26/2010	10:19:33 AM	BCl3 valve closed
3/26/2010	10:19:33 AM	PH3 valve closed
3/26/2010	10:19:33 AM	SiCl4 pre valve closed
3/26/2010	10:19:33 AM	SiCl4 post valve closed
3/26/2010	10:19:33 AM	Bypass valve closed
3/26/2010	10:19:33 AM	Main Vac valve closed
3/26/2010	10:19:33 AM	Bubbler valve closed
3/26/2010	10:19:33 AM	Helium MFC set to  0.000000
3/26/2010	10:19:33 AM	H2 MFC set to  0.000000
3/26/2010	10:19:33 AM	BCl3 MFC set to  0.000000
3/26/2010	10:19:33 AM	SiCl4 MFC set to  0.000000
3/26/2010	10:19:33 AM	Tube furnace set to 0
3/26/2010	10:32:01 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/26/2010	10:32:02 AM	Recipe started at 10:32 AM
3/26/2010	10:32:02 AM	Helium valve closed
3/26/2010	10:32:02 AM	H2 valve closed
3/26/2010	10:32:02 AM	BCl3 valve closed
3/26/2010	10:32:02 AM	PH3 valve closed
3/26/2010	10:32:02 AM	SiCl4 pre valve closed
3/26/2010	10:32:02 AM	SiCl4 post valve closed
3/26/2010	10:32:02 AM	Main Vac valve closed
3/26/2010	10:32:02 AM	Bubbler valve closed
3/26/2010	10:32:02 AM	Bypass valve opened
3/26/2010	10:32:02 AM	Helium MFC set to  0.000000
3/26/2010	10:32:02 AM	H2 MFC set to  0.000000
3/26/2010	10:32:02 AM	BCl3 MFC set to  0.000000
3/26/2010	10:32:02 AM	SiCl4 MFC set to  0.000000
3/26/2010	10:32:02 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	10:32:02 AM	Tube furnace set to 0
3/26/2010	10:32:34 AM	Helium valve closed
3/26/2010	10:32:34 AM	H2 valve closed
3/26/2010	10:32:34 AM	BCl3 valve closed
3/26/2010	10:32:34 AM	PH3 valve closed
3/26/2010	10:32:34 AM	SiCl4 pre valve closed
3/26/2010	10:32:34 AM	SiCl4 post valve closed
3/26/2010	10:32:34 AM	Bubbler valve closed
3/26/2010	10:32:34 AM	Main Vac valve opened
3/26/2010	10:32:34 AM	Bypass valve opened
3/26/2010	10:32:34 AM	Helium MFC set to  0.000000
3/26/2010	10:32:34 AM	H2 MFC set to  0.000000
3/26/2010	10:32:34 AM	BCl3 MFC set to  0.000000
3/26/2010	10:32:34 AM	SiCl4 MFC set to  0.000000
3/26/2010	10:32:34 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	10:32:34 AM	Tube furnace set to 0
3/26/2010	10:32:34 AM	Run finished at 10:32 AM
3/26/2010	10:32:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/26/2010	10:49:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/26/2010	10:49:58 AM	Recipe started at 10:49 AM
3/26/2010	10:49:58 AM	H2 valve closed
3/26/2010	10:49:58 AM	BCl3 valve closed
3/26/2010	10:49:58 AM	PH3 valve closed
3/26/2010	10:49:58 AM	SiCl4 pre valve closed
3/26/2010	10:49:58 AM	SiCl4 post valve closed
3/26/2010	10:49:58 AM	Main Vac valve closed
3/26/2010	10:49:58 AM	Bypass valve closed
3/26/2010	10:49:58 AM	Bubbler valve closed
3/26/2010	10:49:58 AM	Helium valve opened
3/26/2010	10:49:58 AM	Helium MFC set to  500.000000
3/26/2010	10:49:58 AM	H2 MFC set to  0.000000
3/26/2010	10:49:58 AM	BCl3 MFC set to  0.000000
3/26/2010	10:49:58 AM	SiCl4 MFC set to  0.000000
3/26/2010	10:49:58 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	10:49:58 AM	Tube furnace set to 0
3/26/2010	10:51:18 AM	Helium valve closed
3/26/2010	10:51:18 AM	H2 valve closed
3/26/2010	10:51:18 AM	BCl3 valve closed
3/26/2010	10:51:18 AM	PH3 valve closed
3/26/2010	10:51:18 AM	SiCl4 pre valve closed
3/26/2010	10:51:18 AM	SiCl4 post valve closed
3/26/2010	10:51:18 AM	Main Vac valve closed
3/26/2010	10:51:18 AM	Bypass valve closed
3/26/2010	10:51:18 AM	Bubbler valve closed
3/26/2010	10:51:18 AM	Helium MFC set to  0.000000
3/26/2010	10:51:18 AM	H2 MFC set to  0.000000
3/26/2010	10:51:18 AM	BCl3 MFC set to  0.000000
3/26/2010	10:51:18 AM	SiCl4 MFC set to  0.000000
3/26/2010	10:51:18 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	10:51:18 AM	Tube furnace set to 0
3/26/2010	10:51:18 AM	Run finished at 10:51 AM
3/26/2010	10:51:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/26/2010	10:51:26 AM	Helium MFC set to  200.000000
3/26/2010	10:51:28 AM	Helium valve opened
3/26/2010	10:51:37 AM	Bubbler valve opened
3/26/2010	10:51:50 AM	Helium MFC set to  500.000000
3/26/2010	10:52:04 AM	Bubbler valve closed
3/26/2010	10:52:05 AM	Helium valve closed
3/26/2010	10:52:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/26/2010	10:52:18 AM	Recipe started at 10:52 AM
3/26/2010	10:52:18 AM	H2 valve closed
3/26/2010	10:52:18 AM	BCl3 valve closed
3/26/2010	10:52:18 AM	PH3 valve closed
3/26/2010	10:52:18 AM	SiCl4 pre valve closed
3/26/2010	10:52:18 AM	SiCl4 post valve closed
3/26/2010	10:52:18 AM	Main Vac valve closed
3/26/2010	10:52:18 AM	Bypass valve closed
3/26/2010	10:52:18 AM	Bubbler valve closed
3/26/2010	10:52:18 AM	Helium valve opened
3/26/2010	10:52:18 AM	Helium MFC set to  500.000000
3/26/2010	10:52:18 AM	H2 MFC set to  0.000000
3/26/2010	10:52:18 AM	BCl3 MFC set to  0.000000
3/26/2010	10:52:18 AM	SiCl4 MFC set to  0.000000
3/26/2010	10:52:18 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	10:52:18 AM	Tube furnace set to 0
3/26/2010	10:52:18 AM	Helium valve closed
3/26/2010	10:52:18 AM	H2 valve closed
3/26/2010	10:52:18 AM	BCl3 valve closed
3/26/2010	10:52:18 AM	PH3 valve closed
3/26/2010	10:52:18 AM	SiCl4 pre valve closed
3/26/2010	10:52:18 AM	SiCl4 post valve closed
3/26/2010	10:52:18 AM	Main Vac valve closed
3/26/2010	10:52:18 AM	Bypass valve closed
3/26/2010	10:52:18 AM	Bubbler valve closed
3/26/2010	10:52:18 AM	Helium MFC set to  0.000000
3/26/2010	10:52:18 AM	H2 MFC set to  0.000000
3/26/2010	10:52:18 AM	BCl3 MFC set to  0.000000
3/26/2010	10:52:18 AM	SiCl4 MFC set to  0.000000
3/26/2010	10:52:18 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	10:52:18 AM	Tube furnace set to 0
3/26/2010	10:52:33 AM	Helium valve closed
3/26/2010	10:52:33 AM	H2 valve closed
3/26/2010	10:52:33 AM	BCl3 valve closed
3/26/2010	10:52:33 AM	PH3 valve closed
3/26/2010	10:52:33 AM	SiCl4 pre valve closed
3/26/2010	10:52:33 AM	SiCl4 post valve closed
3/26/2010	10:52:33 AM	Main Vac valve closed
3/26/2010	10:52:33 AM	Bubbler valve closed
3/26/2010	10:52:33 AM	Bypass valve opened
3/26/2010	10:52:33 AM	Helium MFC set to  0.000000
3/26/2010	10:52:33 AM	H2 MFC set to  0.000000
3/26/2010	10:52:33 AM	BCl3 MFC set to  0.000000
3/26/2010	10:52:33 AM	SiCl4 MFC set to  0.000000
3/26/2010	10:52:33 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	10:52:33 AM	Tube furnace set to 0
3/26/2010	10:52:56 AM	Helium valve closed
3/26/2010	10:52:56 AM	H2 valve closed
3/26/2010	10:52:56 AM	BCl3 valve closed
3/26/2010	10:52:56 AM	PH3 valve closed
3/26/2010	10:52:56 AM	SiCl4 pre valve closed
3/26/2010	10:52:56 AM	SiCl4 post valve closed
3/26/2010	10:52:56 AM	Bubbler valve closed
3/26/2010	10:52:56 AM	Main Vac valve opened
3/26/2010	10:52:56 AM	Bypass valve opened
3/26/2010	10:52:56 AM	Helium MFC set to  0.000000
3/26/2010	10:52:56 AM	H2 MFC set to  0.000000
3/26/2010	10:52:56 AM	BCl3 MFC set to  0.000000
3/26/2010	10:52:56 AM	SiCl4 MFC set to  0.000000
3/26/2010	10:52:56 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	10:52:56 AM	Tube furnace set to 0
3/26/2010	10:57:56 AM	H2 valve closed
3/26/2010	10:57:56 AM	BCl3 valve closed
3/26/2010	10:57:56 AM	PH3 valve closed
3/26/2010	10:57:56 AM	SiCl4 pre valve closed
3/26/2010	10:57:56 AM	SiCl4 post valve closed
3/26/2010	10:57:56 AM	Main Vac valve closed
3/26/2010	10:57:56 AM	Bypass valve closed
3/26/2010	10:57:56 AM	Bubbler valve closed
3/26/2010	10:57:56 AM	Helium valve opened
3/26/2010	10:57:56 AM	Helium MFC set to  500.000000
3/26/2010	10:57:56 AM	H2 MFC set to  0.000000
3/26/2010	10:57:56 AM	BCl3 MFC set to  0.000000
3/26/2010	10:57:56 AM	SiCl4 MFC set to  0.000000
3/26/2010	10:57:56 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	10:57:56 AM	Tube furnace set to 0
3/26/2010	10:59:18 AM	Helium valve closed
3/26/2010	10:59:18 AM	H2 valve closed
3/26/2010	10:59:18 AM	BCl3 valve closed
3/26/2010	10:59:18 AM	PH3 valve closed
3/26/2010	10:59:18 AM	SiCl4 pre valve closed
3/26/2010	10:59:18 AM	SiCl4 post valve closed
3/26/2010	10:59:18 AM	Main Vac valve closed
3/26/2010	10:59:18 AM	Bypass valve closed
3/26/2010	10:59:18 AM	Bubbler valve closed
3/26/2010	10:59:18 AM	Helium MFC set to  0.000000
3/26/2010	10:59:18 AM	H2 MFC set to  0.000000
3/26/2010	10:59:18 AM	BCl3 MFC set to  0.000000
3/26/2010	10:59:18 AM	SiCl4 MFC set to  0.000000
3/26/2010	10:59:18 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	10:59:18 AM	Tube furnace set to 0
3/26/2010	10:59:22 AM	Helium valve closed
3/26/2010	10:59:22 AM	H2 valve closed
3/26/2010	10:59:22 AM	BCl3 valve closed
3/26/2010	10:59:22 AM	PH3 valve closed
3/26/2010	10:59:22 AM	SiCl4 pre valve closed
3/26/2010	10:59:22 AM	SiCl4 post valve closed
3/26/2010	10:59:22 AM	Main Vac valve closed
3/26/2010	10:59:22 AM	Bubbler valve closed
3/26/2010	10:59:22 AM	Bypass valve opened
3/26/2010	10:59:22 AM	Helium MFC set to  0.000000
3/26/2010	10:59:22 AM	H2 MFC set to  0.000000
3/26/2010	10:59:22 AM	BCl3 MFC set to  0.000000
3/26/2010	10:59:22 AM	SiCl4 MFC set to  0.000000
3/26/2010	10:59:22 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	10:59:22 AM	Tube furnace set to 0
3/26/2010	10:59:45 AM	Helium valve closed
3/26/2010	10:59:45 AM	H2 valve closed
3/26/2010	10:59:45 AM	BCl3 valve closed
3/26/2010	10:59:45 AM	PH3 valve closed
3/26/2010	10:59:45 AM	SiCl4 pre valve closed
3/26/2010	10:59:45 AM	SiCl4 post valve closed
3/26/2010	10:59:45 AM	Bubbler valve closed
3/26/2010	10:59:45 AM	Main Vac valve opened
3/26/2010	10:59:45 AM	Bypass valve opened
3/26/2010	10:59:45 AM	Helium MFC set to  0.000000
3/26/2010	10:59:45 AM	H2 MFC set to  0.000000
3/26/2010	10:59:45 AM	BCl3 MFC set to  0.000000
3/26/2010	10:59:45 AM	SiCl4 MFC set to  0.000000
3/26/2010	10:59:45 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	10:59:45 AM	Tube furnace set to 0
3/26/2010	11:01:00 AM	Run aborted at 11:01 AM
3/26/2010	11:01:00 AM	Helium valve closed
3/26/2010	11:01:00 AM	H2 valve closed
3/26/2010	11:01:00 AM	BCl3 valve closed
3/26/2010	11:01:00 AM	PH3 valve closed
3/26/2010	11:01:00 AM	SiCl4 pre valve closed
3/26/2010	11:01:00 AM	SiCl4 post valve closed
3/26/2010	11:01:00 AM	Bypass valve closed
3/26/2010	11:01:00 AM	Main Vac valve closed
3/26/2010	11:01:00 AM	Bubbler valve closed
3/26/2010	11:01:00 AM	Helium MFC set to  0.000000
3/26/2010	11:01:00 AM	H2 MFC set to  0.000000
3/26/2010	11:01:00 AM	BCl3 MFC set to  0.000000
3/26/2010	11:01:00 AM	SiCl4 MFC set to  0.000000
3/26/2010	11:01:00 AM	Tube furnace set to 0
3/26/2010	11:01:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/26/2010	11:01:02 AM	Main Vac valve closed
3/26/2010	11:01:04 AM	Main Vac valve opened
3/26/2010	11:01:04 AM	Bypass valve closed
3/26/2010	11:01:05 AM	Bypass valve opened
3/26/2010	11:01:16 AM	Main Vac valve closed
3/26/2010	11:01:17 AM	Bypass valve closed
3/26/2010	11:01:33 AM	Bypass valve opened
3/26/2010	11:01:34 AM	Main Vac valve opened
3/26/2010	11:02:06 AM	Recipe started at 11:02 AM
3/26/2010	11:02:06 AM	Helium valve closed
3/26/2010	11:02:06 AM	BCl3 valve closed
3/26/2010	11:02:06 AM	PH3 valve closed
3/26/2010	11:02:06 AM	SiCl4 pre valve closed
3/26/2010	11:02:06 AM	SiCl4 post valve closed
3/26/2010	11:02:06 AM	Main Vac valve closed
3/26/2010	11:02:06 AM	Bypass valve closed
3/26/2010	11:02:06 AM	Bubbler valve closed
3/26/2010	11:02:06 AM	H2 valve opened
3/26/2010	11:02:06 AM	Helium MFC set to  0.000000
3/26/2010	11:02:06 AM	H2 MFC set to  500.000000
3/26/2010	11:02:06 AM	BCl3 MFC set to  0.000000
3/26/2010	11:02:06 AM	SiCl4 MFC set to  0.000000
3/26/2010	11:02:06 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	11:02:06 AM	Tube furnace set to 0
3/26/2010	11:03:26 AM	Helium valve closed
3/26/2010	11:03:26 AM	BCl3 valve closed
3/26/2010	11:03:26 AM	PH3 valve closed
3/26/2010	11:03:26 AM	SiCl4 pre valve closed
3/26/2010	11:03:26 AM	SiCl4 post valve closed
3/26/2010	11:03:26 AM	Main Vac valve closed
3/26/2010	11:03:26 AM	Bypass valve closed
3/26/2010	11:03:26 AM	H2 valve opened
3/26/2010	11:03:26 AM	Bubbler valve opened
3/26/2010	11:03:26 AM	Helium MFC set to  0.000000
3/26/2010	11:03:26 AM	H2 MFC set to  500.000000
3/26/2010	11:03:26 AM	BCl3 MFC set to  0.000000
3/26/2010	11:03:26 AM	SiCl4 MFC set to  0.000000
3/26/2010	11:03:26 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	11:03:26 AM	Tube furnace set to 0
3/26/2010	11:23:27 AM	Helium valve closed
3/26/2010	11:23:27 AM	BCl3 valve closed
3/26/2010	11:23:27 AM	PH3 valve closed
3/26/2010	11:23:27 AM	Main Vac valve closed
3/26/2010	11:23:27 AM	Bypass valve closed
3/26/2010	11:23:27 AM	H2 valve opened
3/26/2010	11:23:27 AM	SiCl4 pre valve opened
3/26/2010	11:23:27 AM	SiCl4 post valve opened
3/26/2010	11:23:27 AM	Bubbler valve opened
3/26/2010	11:23:27 AM	Helium MFC set to  0.000000
3/26/2010	11:23:27 AM	H2 MFC set to  500.000000
3/26/2010	11:23:27 AM	BCl3 MFC set to  0.000000
3/26/2010	11:23:27 AM	SiCl4 MFC set to  325.000000
3/26/2010	11:23:27 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	11:23:27 AM	Tube furnace set to 0
3/26/2010	11:43:27 AM	Helium valve closed
3/26/2010	11:43:27 AM	BCl3 valve closed
3/26/2010	11:43:27 AM	PH3 valve closed
3/26/2010	11:43:27 AM	SiCl4 pre valve closed
3/26/2010	11:43:27 AM	SiCl4 post valve closed
3/26/2010	11:43:27 AM	Main Vac valve closed
3/26/2010	11:43:27 AM	Bypass valve closed
3/26/2010	11:43:27 AM	H2 valve opened
3/26/2010	11:43:27 AM	Bubbler valve opened
3/26/2010	11:43:27 AM	Helium MFC set to  0.000000
3/26/2010	11:43:27 AM	H2 MFC set to  500.000000
3/26/2010	11:43:27 AM	BCl3 MFC set to  0.000000
3/26/2010	11:43:27 AM	SiCl4 MFC set to  0.000000
3/26/2010	11:43:27 AM	Bypass solenoid MFC set to  0.000000
3/26/2010	11:43:27 AM	Tube furnace set to 0
3/26/2010	12:03:28 PM	H2 valve closed
3/26/2010	12:03:28 PM	BCl3 valve closed
3/26/2010	12:03:28 PM	PH3 valve closed
3/26/2010	12:03:28 PM	SiCl4 pre valve closed
3/26/2010	12:03:28 PM	SiCl4 post valve closed
3/26/2010	12:03:28 PM	Main Vac valve closed
3/26/2010	12:03:28 PM	Bypass valve closed
3/26/2010	12:03:28 PM	Helium valve opened
3/26/2010	12:03:28 PM	Bubbler valve opened
3/26/2010	12:03:28 PM	Helium MFC set to  500.000000
3/26/2010	12:03:28 PM	H2 MFC set to  0.000000
3/26/2010	12:03:28 PM	BCl3 MFC set to  0.000000
3/26/2010	12:03:28 PM	SiCl4 MFC set to  0.000000
3/26/2010	12:03:28 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	12:03:28 PM	Tube furnace set to 0
3/26/2010	12:10:59 PM	Run aborted at 12:10 PM
3/26/2010	12:10:59 PM	Helium valve closed
3/26/2010	12:10:59 PM	H2 valve closed
3/26/2010	12:10:59 PM	BCl3 valve closed
3/26/2010	12:10:59 PM	PH3 valve closed
3/26/2010	12:10:59 PM	SiCl4 pre valve closed
3/26/2010	12:10:59 PM	SiCl4 post valve closed
3/26/2010	12:10:59 PM	Bypass valve closed
3/26/2010	12:10:59 PM	Main Vac valve closed
3/26/2010	12:10:59 PM	Bubbler valve closed
3/26/2010	12:10:59 PM	Helium MFC set to  0.000000
3/26/2010	12:10:59 PM	H2 MFC set to  0.000000
3/26/2010	12:10:59 PM	BCl3 MFC set to  0.000000
3/26/2010	12:10:59 PM	SiCl4 MFC set to  0.000000
3/26/2010	12:10:59 PM	Tube furnace set to 0
3/26/2010	12:20:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/26/2010	12:20:17 PM	Recipe started at 12:20 PM
3/26/2010	12:20:17 PM	H2 valve closed
3/26/2010	12:20:17 PM	BCl3 valve closed
3/26/2010	12:20:17 PM	PH3 valve closed
3/26/2010	12:20:17 PM	SiCl4 pre valve closed
3/26/2010	12:20:17 PM	SiCl4 post valve closed
3/26/2010	12:20:17 PM	Main Vac valve closed
3/26/2010	12:20:17 PM	Bypass valve closed
3/26/2010	12:20:17 PM	Bubbler valve closed
3/26/2010	12:20:17 PM	Helium valve opened
3/26/2010	12:20:17 PM	Helium MFC set to  500.000000
3/26/2010	12:20:17 PM	H2 MFC set to  0.000000
3/26/2010	12:20:17 PM	BCl3 MFC set to  0.000000
3/26/2010	12:20:17 PM	SiCl4 MFC set to  0.000000
3/26/2010	12:20:17 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	12:20:17 PM	Tube furnace set to 0
3/26/2010	12:20:17 PM	Helium valve closed
3/26/2010	12:20:17 PM	H2 valve closed
3/26/2010	12:20:17 PM	BCl3 valve closed
3/26/2010	12:20:17 PM	PH3 valve closed
3/26/2010	12:20:17 PM	SiCl4 pre valve closed
3/26/2010	12:20:17 PM	SiCl4 post valve closed
3/26/2010	12:20:17 PM	Main Vac valve closed
3/26/2010	12:20:17 PM	Bypass valve closed
3/26/2010	12:20:17 PM	Bubbler valve closed
3/26/2010	12:20:17 PM	Helium MFC set to  0.000000
3/26/2010	12:20:17 PM	H2 MFC set to  0.000000
3/26/2010	12:20:17 PM	BCl3 MFC set to  0.000000
3/26/2010	12:20:17 PM	SiCl4 MFC set to  0.000000
3/26/2010	12:20:17 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	12:20:17 PM	Tube furnace set to 0
3/26/2010	12:20:17 PM	Run finished at 12:20 PM
3/26/2010	12:20:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/26/2010	12:20:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/26/2010	12:20:20 PM	Recipe started at 12:20 PM
3/26/2010	12:20:20 PM	Helium valve closed
3/26/2010	12:20:20 PM	H2 valve closed
3/26/2010	12:20:20 PM	BCl3 valve closed
3/26/2010	12:20:20 PM	PH3 valve closed
3/26/2010	12:20:20 PM	SiCl4 pre valve closed
3/26/2010	12:20:20 PM	SiCl4 post valve closed
3/26/2010	12:20:20 PM	Main Vac valve closed
3/26/2010	12:20:20 PM	Bubbler valve closed
3/26/2010	12:20:20 PM	Bypass valve opened
3/26/2010	12:20:20 PM	Helium MFC set to  0.000000
3/26/2010	12:20:20 PM	H2 MFC set to  0.000000
3/26/2010	12:20:20 PM	BCl3 MFC set to  0.000000
3/26/2010	12:20:20 PM	SiCl4 MFC set to  0.000000
3/26/2010	12:20:20 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	12:20:20 PM	Tube furnace set to 0
3/26/2010	12:20:52 PM	Helium valve closed
3/26/2010	12:20:52 PM	H2 valve closed
3/26/2010	12:20:52 PM	BCl3 valve closed
3/26/2010	12:20:52 PM	PH3 valve closed
3/26/2010	12:20:53 PM	SiCl4 pre valve closed
3/26/2010	12:20:53 PM	SiCl4 post valve closed
3/26/2010	12:20:53 PM	Bubbler valve closed
3/26/2010	12:20:53 PM	Main Vac valve opened
3/26/2010	12:20:53 PM	Bypass valve opened
3/26/2010	12:20:53 PM	Helium MFC set to  0.000000
3/26/2010	12:20:53 PM	H2 MFC set to  0.000000
3/26/2010	12:20:53 PM	BCl3 MFC set to  0.000000
3/26/2010	12:20:53 PM	SiCl4 MFC set to  0.000000
3/26/2010	12:20:53 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	12:20:53 PM	Tube furnace set to 0
3/26/2010	12:20:53 PM	Run finished at 12:20 PM
3/26/2010	12:20:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/26/2010	12:27:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/26/2010	12:27:28 PM	Recipe started at 12:27 PM
3/26/2010	12:27:28 PM	H2 valve closed
3/26/2010	12:27:28 PM	BCl3 valve closed
3/26/2010	12:27:28 PM	PH3 valve closed
3/26/2010	12:27:28 PM	SiCl4 pre valve closed
3/26/2010	12:27:28 PM	SiCl4 post valve closed
3/26/2010	12:27:28 PM	Main Vac valve closed
3/26/2010	12:27:28 PM	Bypass valve closed
3/26/2010	12:27:28 PM	Bubbler valve closed
3/26/2010	12:27:28 PM	Helium valve opened
3/26/2010	12:27:28 PM	Helium MFC set to  500.000000
3/26/2010	12:27:28 PM	H2 MFC set to  0.000000
3/26/2010	12:27:28 PM	BCl3 MFC set to  0.000000
3/26/2010	12:27:28 PM	SiCl4 MFC set to  0.000000
3/26/2010	12:27:28 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	12:27:28 PM	Tube furnace set to 0
3/26/2010	12:28:49 PM	Helium valve closed
3/26/2010	12:28:49 PM	H2 valve closed
3/26/2010	12:28:49 PM	BCl3 valve closed
3/26/2010	12:28:49 PM	PH3 valve closed
3/26/2010	12:28:49 PM	SiCl4 pre valve closed
3/26/2010	12:28:49 PM	SiCl4 post valve closed
3/26/2010	12:28:49 PM	Main Vac valve closed
3/26/2010	12:28:49 PM	Bypass valve closed
3/26/2010	12:28:49 PM	Bubbler valve closed
3/26/2010	12:28:49 PM	Helium MFC set to  0.000000
3/26/2010	12:28:49 PM	H2 MFC set to  0.000000
3/26/2010	12:28:49 PM	BCl3 MFC set to  0.000000
3/26/2010	12:28:49 PM	SiCl4 MFC set to  0.000000
3/26/2010	12:28:49 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	12:28:49 PM	Tube furnace set to 0
3/26/2010	12:29:04 PM	Helium valve closed
3/26/2010	12:29:04 PM	H2 valve closed
3/26/2010	12:29:04 PM	BCl3 valve closed
3/26/2010	12:29:04 PM	PH3 valve closed
3/26/2010	12:29:04 PM	SiCl4 pre valve closed
3/26/2010	12:29:04 PM	SiCl4 post valve closed
3/26/2010	12:29:04 PM	Main Vac valve closed
3/26/2010	12:29:04 PM	Bubbler valve closed
3/26/2010	12:29:04 PM	Bypass valve opened
3/26/2010	12:29:04 PM	Helium MFC set to  0.000000
3/26/2010	12:29:04 PM	H2 MFC set to  0.000000
3/26/2010	12:29:04 PM	BCl3 MFC set to  0.000000
3/26/2010	12:29:04 PM	SiCl4 MFC set to  0.000000
3/26/2010	12:29:04 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	12:29:04 PM	Tube furnace set to 0
3/26/2010	12:29:27 PM	Helium valve closed
3/26/2010	12:29:27 PM	H2 valve closed
3/26/2010	12:29:27 PM	BCl3 valve closed
3/26/2010	12:29:27 PM	PH3 valve closed
3/26/2010	12:29:27 PM	SiCl4 pre valve closed
3/26/2010	12:29:27 PM	SiCl4 post valve closed
3/26/2010	12:29:27 PM	Bubbler valve closed
3/26/2010	12:29:27 PM	Main Vac valve opened
3/26/2010	12:29:27 PM	Bypass valve opened
3/26/2010	12:29:27 PM	Helium MFC set to  0.000000
3/26/2010	12:29:27 PM	H2 MFC set to  0.000000
3/26/2010	12:29:27 PM	BCl3 MFC set to  0.000000
3/26/2010	12:29:27 PM	SiCl4 MFC set to  0.000000
3/26/2010	12:29:27 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	12:29:27 PM	Tube furnace set to 0
3/26/2010	12:34:27 PM	H2 valve closed
3/26/2010	12:34:27 PM	BCl3 valve closed
3/26/2010	12:34:27 PM	PH3 valve closed
3/26/2010	12:34:27 PM	SiCl4 pre valve closed
3/26/2010	12:34:27 PM	SiCl4 post valve closed
3/26/2010	12:34:27 PM	Main Vac valve closed
3/26/2010	12:34:27 PM	Bypass valve closed
3/26/2010	12:34:27 PM	Bubbler valve closed
3/26/2010	12:34:27 PM	Helium valve opened
3/26/2010	12:34:27 PM	Helium MFC set to  500.000000
3/26/2010	12:34:27 PM	H2 MFC set to  0.000000
3/26/2010	12:34:27 PM	BCl3 MFC set to  0.000000
3/26/2010	12:34:27 PM	SiCl4 MFC set to  0.000000
3/26/2010	12:34:27 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	12:34:27 PM	Tube furnace set to 0
3/26/2010	12:35:49 PM	Helium valve closed
3/26/2010	12:35:49 PM	H2 valve closed
3/26/2010	12:35:49 PM	BCl3 valve closed
3/26/2010	12:35:49 PM	PH3 valve closed
3/26/2010	12:35:49 PM	SiCl4 pre valve closed
3/26/2010	12:35:49 PM	SiCl4 post valve closed
3/26/2010	12:35:49 PM	Main Vac valve closed
3/26/2010	12:35:49 PM	Bypass valve closed
3/26/2010	12:35:49 PM	Bubbler valve closed
3/26/2010	12:35:49 PM	Helium MFC set to  0.000000
3/26/2010	12:35:49 PM	H2 MFC set to  0.000000
3/26/2010	12:35:49 PM	BCl3 MFC set to  0.000000
3/26/2010	12:35:49 PM	SiCl4 MFC set to  0.000000
3/26/2010	12:35:49 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	12:35:49 PM	Tube furnace set to 0
3/26/2010	12:36:04 PM	Helium valve closed
3/26/2010	12:36:04 PM	H2 valve closed
3/26/2010	12:36:04 PM	BCl3 valve closed
3/26/2010	12:36:04 PM	PH3 valve closed
3/26/2010	12:36:04 PM	SiCl4 pre valve closed
3/26/2010	12:36:04 PM	SiCl4 post valve closed
3/26/2010	12:36:04 PM	Main Vac valve closed
3/26/2010	12:36:04 PM	Bubbler valve closed
3/26/2010	12:36:04 PM	Bypass valve opened
3/26/2010	12:36:04 PM	Helium MFC set to  0.000000
3/26/2010	12:36:04 PM	H2 MFC set to  0.000000
3/26/2010	12:36:04 PM	BCl3 MFC set to  0.000000
3/26/2010	12:36:04 PM	SiCl4 MFC set to  0.000000
3/26/2010	12:36:04 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	12:36:04 PM	Tube furnace set to 0
3/26/2010	12:36:26 PM	Helium valve closed
3/26/2010	12:36:26 PM	H2 valve closed
3/26/2010	12:36:26 PM	BCl3 valve closed
3/26/2010	12:36:26 PM	PH3 valve closed
3/26/2010	12:36:26 PM	SiCl4 pre valve closed
3/26/2010	12:36:26 PM	SiCl4 post valve closed
3/26/2010	12:36:26 PM	Bubbler valve closed
3/26/2010	12:36:26 PM	Main Vac valve opened
3/26/2010	12:36:26 PM	Bypass valve opened
3/26/2010	12:36:26 PM	Helium MFC set to  0.000000
3/26/2010	12:36:26 PM	H2 MFC set to  0.000000
3/26/2010	12:36:26 PM	BCl3 MFC set to  0.000000
3/26/2010	12:36:26 PM	SiCl4 MFC set to  0.000000
3/26/2010	12:36:26 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	12:36:26 PM	Tube furnace set to 0
3/26/2010	12:41:27 PM	H2 valve closed
3/26/2010	12:41:27 PM	BCl3 valve closed
3/26/2010	12:41:27 PM	PH3 valve closed
3/26/2010	12:41:27 PM	SiCl4 pre valve closed
3/26/2010	12:41:27 PM	SiCl4 post valve closed
3/26/2010	12:41:27 PM	Main Vac valve closed
3/26/2010	12:41:27 PM	Bypass valve closed
3/26/2010	12:41:27 PM	Bubbler valve closed
3/26/2010	12:41:27 PM	Helium valve opened
3/26/2010	12:41:27 PM	Helium MFC set to  500.000000
3/26/2010	12:41:27 PM	H2 MFC set to  0.000000
3/26/2010	12:41:27 PM	BCl3 MFC set to  0.000000
3/26/2010	12:41:27 PM	SiCl4 MFC set to  0.000000
3/26/2010	12:41:27 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	12:41:27 PM	Tube furnace set to 0
3/26/2010	12:42:48 PM	Helium valve closed
3/26/2010	12:42:48 PM	H2 valve closed
3/26/2010	12:42:48 PM	BCl3 valve closed
3/26/2010	12:42:48 PM	PH3 valve closed
3/26/2010	12:42:48 PM	SiCl4 pre valve closed
3/26/2010	12:42:48 PM	SiCl4 post valve closed
3/26/2010	12:42:48 PM	Main Vac valve closed
3/26/2010	12:42:48 PM	Bypass valve closed
3/26/2010	12:42:48 PM	Bubbler valve closed
3/26/2010	12:42:48 PM	Helium MFC set to  0.000000
3/26/2010	12:42:48 PM	H2 MFC set to  0.000000
3/26/2010	12:42:48 PM	BCl3 MFC set to  0.000000
3/26/2010	12:42:48 PM	SiCl4 MFC set to  0.000000
3/26/2010	12:42:48 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	12:42:48 PM	Tube furnace set to 0
3/26/2010	12:43:04 PM	Helium valve closed
3/26/2010	12:43:04 PM	H2 valve closed
3/26/2010	12:43:04 PM	BCl3 valve closed
3/26/2010	12:43:04 PM	PH3 valve closed
3/26/2010	12:43:04 PM	SiCl4 pre valve closed
3/26/2010	12:43:04 PM	SiCl4 post valve closed
3/26/2010	12:43:04 PM	Main Vac valve closed
3/26/2010	12:43:04 PM	Bubbler valve closed
3/26/2010	12:43:04 PM	Bypass valve opened
3/26/2010	12:43:04 PM	Helium MFC set to  0.000000
3/26/2010	12:43:04 PM	H2 MFC set to  0.000000
3/26/2010	12:43:04 PM	BCl3 MFC set to  0.000000
3/26/2010	12:43:04 PM	SiCl4 MFC set to  0.000000
3/26/2010	12:43:04 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	12:43:04 PM	Tube furnace set to 0
3/26/2010	12:43:26 PM	Helium valve closed
3/26/2010	12:43:26 PM	H2 valve closed
3/26/2010	12:43:26 PM	BCl3 valve closed
3/26/2010	12:43:26 PM	PH3 valve closed
3/26/2010	12:43:26 PM	SiCl4 pre valve closed
3/26/2010	12:43:26 PM	SiCl4 post valve closed
3/26/2010	12:43:26 PM	Bubbler valve closed
3/26/2010	12:43:26 PM	Main Vac valve opened
3/26/2010	12:43:26 PM	Bypass valve opened
3/26/2010	12:43:26 PM	Helium MFC set to  0.000000
3/26/2010	12:43:26 PM	H2 MFC set to  0.000000
3/26/2010	12:43:26 PM	BCl3 MFC set to  0.000000
3/26/2010	12:43:26 PM	SiCl4 MFC set to  0.000000
3/26/2010	12:43:26 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	12:43:26 PM	Tube furnace set to 0
3/26/2010	12:46:57 PM	Run aborted at 12:46 PM
3/26/2010	12:46:57 PM	Helium valve closed
3/26/2010	12:46:57 PM	H2 valve closed
3/26/2010	12:46:57 PM	BCl3 valve closed
3/26/2010	12:46:57 PM	PH3 valve closed
3/26/2010	12:46:57 PM	SiCl4 pre valve closed
3/26/2010	12:46:57 PM	SiCl4 post valve closed
3/26/2010	12:46:57 PM	Bypass valve closed
3/26/2010	12:46:57 PM	Main Vac valve closed
3/26/2010	12:46:57 PM	Bubbler valve closed
3/26/2010	12:46:57 PM	Helium MFC set to  0.000000
3/26/2010	12:46:57 PM	H2 MFC set to  0.000000
3/26/2010	12:46:57 PM	BCl3 MFC set to  0.000000
3/26/2010	12:46:57 PM	SiCl4 MFC set to  0.000000
3/26/2010	12:46:57 PM	Tube furnace set to 0
3/26/2010	12:46:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/26/2010	12:46:57 PM	Bypass valve closed
3/26/2010	12:47:11 PM	Main Vac valve closed
3/26/2010	12:47:13 PM	Bypass valve opened
3/26/2010	12:47:14 PM	Main Vac valve opened
3/26/2010	12:55:24 PM	Recipe started at 12:55 PM
3/26/2010	12:55:24 PM	Helium valve closed
3/26/2010	12:55:24 PM	BCl3 valve closed
3/26/2010	12:55:24 PM	PH3 valve closed
3/26/2010	12:55:24 PM	SiCl4 pre valve closed
3/26/2010	12:55:24 PM	SiCl4 post valve closed
3/26/2010	12:55:24 PM	Main Vac valve closed
3/26/2010	12:55:24 PM	Bypass valve closed
3/26/2010	12:55:24 PM	Bubbler valve closed
3/26/2010	12:55:24 PM	H2 valve opened
3/26/2010	12:55:24 PM	Helium MFC set to  0.000000
3/26/2010	12:55:24 PM	H2 MFC set to  500.000000
3/26/2010	12:55:24 PM	BCl3 MFC set to  0.000000
3/26/2010	12:55:24 PM	SiCl4 MFC set to  0.000000
3/26/2010	12:55:24 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	12:55:24 PM	Tube furnace set to 0
3/26/2010	12:56:47 PM	Helium valve closed
3/26/2010	12:56:47 PM	BCl3 valve closed
3/26/2010	12:56:47 PM	PH3 valve closed
3/26/2010	12:56:47 PM	SiCl4 pre valve closed
3/26/2010	12:56:47 PM	SiCl4 post valve closed
3/26/2010	12:56:47 PM	Main Vac valve closed
3/26/2010	12:56:47 PM	Bypass valve closed
3/26/2010	12:56:47 PM	H2 valve opened
3/26/2010	12:56:47 PM	Bubbler valve opened
3/26/2010	12:56:47 PM	Helium MFC set to  0.000000
3/26/2010	12:56:47 PM	H2 MFC set to  500.000000
3/26/2010	12:56:47 PM	BCl3 MFC set to  0.000000
3/26/2010	12:56:47 PM	SiCl4 MFC set to  0.000000
3/26/2010	12:56:47 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	12:56:47 PM	Tube furnace set to 0
3/26/2010	1:16:47 PM	Helium valve closed
3/26/2010	1:16:47 PM	BCl3 valve closed
3/26/2010	1:16:47 PM	PH3 valve closed
3/26/2010	1:16:47 PM	Main Vac valve closed
3/26/2010	1:16:47 PM	Bypass valve closed
3/26/2010	1:16:47 PM	H2 valve opened
3/26/2010	1:16:47 PM	SiCl4 pre valve opened
3/26/2010	1:16:47 PM	SiCl4 post valve opened
3/26/2010	1:16:47 PM	Bubbler valve opened
3/26/2010	1:16:47 PM	Helium MFC set to  0.000000
3/26/2010	1:16:47 PM	H2 MFC set to  500.000000
3/26/2010	1:16:47 PM	BCl3 MFC set to  0.000000
3/26/2010	1:16:47 PM	SiCl4 MFC set to  360.000000
3/26/2010	1:16:47 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	1:16:47 PM	Tube furnace set to 0
3/26/2010	1:36:48 PM	Helium valve closed
3/26/2010	1:36:48 PM	BCl3 valve closed
3/26/2010	1:36:48 PM	PH3 valve closed
3/26/2010	1:36:48 PM	SiCl4 pre valve closed
3/26/2010	1:36:48 PM	SiCl4 post valve closed
3/26/2010	1:36:48 PM	Main Vac valve closed
3/26/2010	1:36:48 PM	Bypass valve closed
3/26/2010	1:36:48 PM	H2 valve opened
3/26/2010	1:36:48 PM	Bubbler valve opened
3/26/2010	1:36:48 PM	Helium MFC set to  0.000000
3/26/2010	1:36:48 PM	H2 MFC set to  500.000000
3/26/2010	1:36:48 PM	BCl3 MFC set to  0.000000
3/26/2010	1:36:48 PM	SiCl4 MFC set to  0.000000
3/26/2010	1:36:48 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	1:36:48 PM	Tube furnace set to 0
3/26/2010	1:56:48 PM	H2 valve closed
3/26/2010	1:56:48 PM	BCl3 valve closed
3/26/2010	1:56:48 PM	PH3 valve closed
3/26/2010	1:56:48 PM	SiCl4 pre valve closed
3/26/2010	1:56:48 PM	SiCl4 post valve closed
3/26/2010	1:56:48 PM	Main Vac valve closed
3/26/2010	1:56:48 PM	Bypass valve closed
3/26/2010	1:56:48 PM	Helium valve opened
3/26/2010	1:56:48 PM	Bubbler valve opened
3/26/2010	1:56:48 PM	Helium MFC set to  500.000000
3/26/2010	1:56:48 PM	H2 MFC set to  0.000000
3/26/2010	1:56:48 PM	BCl3 MFC set to  0.000000
3/26/2010	1:56:48 PM	SiCl4 MFC set to  0.000000
3/26/2010	1:56:48 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	1:56:48 PM	Tube furnace set to 0
3/26/2010	2:16:48 PM	Helium valve closed
3/26/2010	2:16:48 PM	H2 valve closed
3/26/2010	2:16:48 PM	BCl3 valve closed
3/26/2010	2:16:48 PM	PH3 valve closed
3/26/2010	2:16:48 PM	SiCl4 pre valve closed
3/26/2010	2:16:48 PM	SiCl4 post valve closed
3/26/2010	2:16:48 PM	Main Vac valve closed
3/26/2010	2:16:48 PM	Bypass valve closed
3/26/2010	2:16:48 PM	Bubbler valve closed
3/26/2010	2:16:48 PM	Helium MFC set to  0.000000
3/26/2010	2:16:48 PM	H2 MFC set to  0.000000
3/26/2010	2:16:48 PM	BCl3 MFC set to  0.000000
3/26/2010	2:16:48 PM	SiCl4 MFC set to  0.000000
3/26/2010	2:16:48 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	2:16:48 PM	Tube furnace set to 0
3/26/2010	2:16:49 PM	Run finished at 2:16 PM
3/26/2010	2:28:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/26/2010	2:28:44 PM	Recipe started at 2:28 PM
3/26/2010	2:28:44 PM	Helium valve closed
3/26/2010	2:28:44 PM	H2 valve closed
3/26/2010	2:28:44 PM	BCl3 valve closed
3/26/2010	2:28:44 PM	PH3 valve closed
3/26/2010	2:28:44 PM	SiCl4 pre valve closed
3/26/2010	2:28:44 PM	SiCl4 post valve closed
3/26/2010	2:28:44 PM	Main Vac valve closed
3/26/2010	2:28:44 PM	Bubbler valve closed
3/26/2010	2:28:44 PM	Bypass valve opened
3/26/2010	2:28:44 PM	Helium MFC set to  0.000000
3/26/2010	2:28:44 PM	H2 MFC set to  0.000000
3/26/2010	2:28:44 PM	BCl3 MFC set to  0.000000
3/26/2010	2:28:44 PM	SiCl4 MFC set to  0.000000
3/26/2010	2:28:44 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	2:28:44 PM	Tube furnace set to 0
3/26/2010	2:29:17 PM	Helium valve closed
3/26/2010	2:29:17 PM	H2 valve closed
3/26/2010	2:29:17 PM	BCl3 valve closed
3/26/2010	2:29:17 PM	PH3 valve closed
3/26/2010	2:29:17 PM	SiCl4 pre valve closed
3/26/2010	2:29:17 PM	SiCl4 post valve closed
3/26/2010	2:29:17 PM	Bubbler valve closed
3/26/2010	2:29:17 PM	Main Vac valve opened
3/26/2010	2:29:17 PM	Bypass valve opened
3/26/2010	2:29:17 PM	Helium MFC set to  0.000000
3/26/2010	2:29:17 PM	H2 MFC set to  0.000000
3/26/2010	2:29:17 PM	BCl3 MFC set to  0.000000
3/26/2010	2:29:17 PM	SiCl4 MFC set to  0.000000
3/26/2010	2:29:17 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	2:29:17 PM	Tube furnace set to 0
3/26/2010	2:29:17 PM	Run finished at 2:29 PM
3/26/2010	2:29:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/26/2010	2:39:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/26/2010	2:39:25 PM	Recipe started at 2:39 PM
3/26/2010	2:39:25 PM	H2 valve closed
3/26/2010	2:39:25 PM	BCl3 valve closed
3/26/2010	2:39:25 PM	PH3 valve closed
3/26/2010	2:39:25 PM	SiCl4 pre valve closed
3/26/2010	2:39:25 PM	SiCl4 post valve closed
3/26/2010	2:39:25 PM	Main Vac valve closed
3/26/2010	2:39:25 PM	Bypass valve closed
3/26/2010	2:39:25 PM	Bubbler valve closed
3/26/2010	2:39:25 PM	Helium valve opened
3/26/2010	2:39:25 PM	Helium MFC set to  500.000000
3/26/2010	2:39:25 PM	H2 MFC set to  0.000000
3/26/2010	2:39:25 PM	BCl3 MFC set to  0.000000
3/26/2010	2:39:25 PM	SiCl4 MFC set to  0.000000
3/26/2010	2:39:25 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	2:39:25 PM	Tube furnace set to 0
3/26/2010	2:40:47 PM	Helium valve closed
3/26/2010	2:40:47 PM	H2 valve closed
3/26/2010	2:40:47 PM	BCl3 valve closed
3/26/2010	2:40:47 PM	PH3 valve closed
3/26/2010	2:40:47 PM	SiCl4 pre valve closed
3/26/2010	2:40:47 PM	SiCl4 post valve closed
3/26/2010	2:40:47 PM	Main Vac valve closed
3/26/2010	2:40:47 PM	Bypass valve closed
3/26/2010	2:40:47 PM	Bubbler valve closed
3/26/2010	2:40:47 PM	Helium MFC set to  0.000000
3/26/2010	2:40:47 PM	H2 MFC set to  0.000000
3/26/2010	2:40:47 PM	BCl3 MFC set to  0.000000
3/26/2010	2:40:47 PM	SiCl4 MFC set to  0.000000
3/26/2010	2:40:47 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	2:40:47 PM	Tube furnace set to 0
3/26/2010	2:41:02 PM	Helium valve closed
3/26/2010	2:41:02 PM	H2 valve closed
3/26/2010	2:41:02 PM	BCl3 valve closed
3/26/2010	2:41:02 PM	PH3 valve closed
3/26/2010	2:41:02 PM	SiCl4 pre valve closed
3/26/2010	2:41:02 PM	SiCl4 post valve closed
3/26/2010	2:41:02 PM	Main Vac valve closed
3/26/2010	2:41:02 PM	Bubbler valve closed
3/26/2010	2:41:02 PM	Bypass valve opened
3/26/2010	2:41:02 PM	Helium MFC set to  0.000000
3/26/2010	2:41:02 PM	H2 MFC set to  0.000000
3/26/2010	2:41:02 PM	BCl3 MFC set to  0.000000
3/26/2010	2:41:02 PM	SiCl4 MFC set to  0.000000
3/26/2010	2:41:02 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	2:41:02 PM	Tube furnace set to 0
3/26/2010	2:41:24 PM	Helium valve closed
3/26/2010	2:41:24 PM	H2 valve closed
3/26/2010	2:41:24 PM	BCl3 valve closed
3/26/2010	2:41:24 PM	PH3 valve closed
3/26/2010	2:41:24 PM	SiCl4 pre valve closed
3/26/2010	2:41:24 PM	SiCl4 post valve closed
3/26/2010	2:41:24 PM	Bubbler valve closed
3/26/2010	2:41:24 PM	Main Vac valve opened
3/26/2010	2:41:24 PM	Bypass valve opened
3/26/2010	2:41:24 PM	Helium MFC set to  0.000000
3/26/2010	2:41:24 PM	H2 MFC set to  0.000000
3/26/2010	2:41:24 PM	BCl3 MFC set to  0.000000
3/26/2010	2:41:24 PM	SiCl4 MFC set to  0.000000
3/26/2010	2:41:24 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	2:41:24 PM	Tube furnace set to 0
3/26/2010	2:45:18 PM	H2 valve closed
3/26/2010	2:45:18 PM	BCl3 valve closed
3/26/2010	2:45:18 PM	PH3 valve closed
3/26/2010	2:45:18 PM	SiCl4 pre valve closed
3/26/2010	2:45:18 PM	SiCl4 post valve closed
3/26/2010	2:45:18 PM	Main Vac valve closed
3/26/2010	2:45:18 PM	Bypass valve closed
3/26/2010	2:45:18 PM	Bubbler valve closed
3/26/2010	2:45:18 PM	Helium valve opened
3/26/2010	2:45:18 PM	Helium MFC set to  500.000000
3/26/2010	2:45:18 PM	H2 MFC set to  0.000000
3/26/2010	2:45:18 PM	BCl3 MFC set to  0.000000
3/26/2010	2:45:18 PM	SiCl4 MFC set to  0.000000
3/26/2010	2:45:18 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	2:45:18 PM	Tube furnace set to 0
3/26/2010	2:46:40 PM	Helium valve closed
3/26/2010	2:46:40 PM	H2 valve closed
3/26/2010	2:46:41 PM	BCl3 valve closed
3/26/2010	2:46:41 PM	PH3 valve closed
3/26/2010	2:46:41 PM	SiCl4 pre valve closed
3/26/2010	2:46:41 PM	SiCl4 post valve closed
3/26/2010	2:46:41 PM	Main Vac valve closed
3/26/2010	2:46:41 PM	Bypass valve closed
3/26/2010	2:46:41 PM	Bubbler valve closed
3/26/2010	2:46:41 PM	Helium MFC set to  0.000000
3/26/2010	2:46:41 PM	H2 MFC set to  0.000000
3/26/2010	2:46:41 PM	BCl3 MFC set to  0.000000
3/26/2010	2:46:41 PM	SiCl4 MFC set to  0.000000
3/26/2010	2:46:41 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	2:46:41 PM	Tube furnace set to 0
3/26/2010	2:46:56 PM	Helium valve closed
3/26/2010	2:46:56 PM	H2 valve closed
3/26/2010	2:46:56 PM	BCl3 valve closed
3/26/2010	2:46:56 PM	PH3 valve closed
3/26/2010	2:46:56 PM	SiCl4 pre valve closed
3/26/2010	2:46:56 PM	SiCl4 post valve closed
3/26/2010	2:46:56 PM	Main Vac valve closed
3/26/2010	2:46:56 PM	Bubbler valve closed
3/26/2010	2:46:56 PM	Bypass valve opened
3/26/2010	2:46:56 PM	Helium MFC set to  0.000000
3/26/2010	2:46:56 PM	H2 MFC set to  0.000000
3/26/2010	2:46:56 PM	BCl3 MFC set to  0.000000
3/26/2010	2:46:56 PM	SiCl4 MFC set to  0.000000
3/26/2010	2:46:56 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	2:46:56 PM	Tube furnace set to 0
3/26/2010	2:47:18 PM	Helium valve closed
3/26/2010	2:47:18 PM	H2 valve closed
3/26/2010	2:47:18 PM	BCl3 valve closed
3/26/2010	2:47:18 PM	PH3 valve closed
3/26/2010	2:47:18 PM	SiCl4 pre valve closed
3/26/2010	2:47:18 PM	SiCl4 post valve closed
3/26/2010	2:47:18 PM	Bubbler valve closed
3/26/2010	2:47:18 PM	Main Vac valve opened
3/26/2010	2:47:18 PM	Bypass valve opened
3/26/2010	2:47:18 PM	Helium MFC set to  0.000000
3/26/2010	2:47:18 PM	H2 MFC set to  0.000000
3/26/2010	2:47:18 PM	BCl3 MFC set to  0.000000
3/26/2010	2:47:18 PM	SiCl4 MFC set to  0.000000
3/26/2010	2:47:18 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	2:47:18 PM	Tube furnace set to 0
3/26/2010	2:52:19 PM	H2 valve closed
3/26/2010	2:52:19 PM	BCl3 valve closed
3/26/2010	2:52:19 PM	PH3 valve closed
3/26/2010	2:52:19 PM	SiCl4 pre valve closed
3/26/2010	2:52:19 PM	SiCl4 post valve closed
3/26/2010	2:52:19 PM	Main Vac valve closed
3/26/2010	2:52:19 PM	Bypass valve closed
3/26/2010	2:52:19 PM	Bubbler valve closed
3/26/2010	2:52:19 PM	Helium valve opened
3/26/2010	2:52:19 PM	Helium MFC set to  500.000000
3/26/2010	2:52:19 PM	H2 MFC set to  0.000000
3/26/2010	2:52:19 PM	BCl3 MFC set to  0.000000
3/26/2010	2:52:19 PM	SiCl4 MFC set to  0.000000
3/26/2010	2:52:19 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	2:52:19 PM	Tube furnace set to 0
3/26/2010	2:53:41 PM	Helium valve closed
3/26/2010	2:53:41 PM	H2 valve closed
3/26/2010	2:53:41 PM	BCl3 valve closed
3/26/2010	2:53:41 PM	PH3 valve closed
3/26/2010	2:53:41 PM	SiCl4 pre valve closed
3/26/2010	2:53:41 PM	SiCl4 post valve closed
3/26/2010	2:53:41 PM	Main Vac valve closed
3/26/2010	2:53:41 PM	Bypass valve closed
3/26/2010	2:53:41 PM	Bubbler valve closed
3/26/2010	2:53:41 PM	Helium MFC set to  0.000000
3/26/2010	2:53:41 PM	H2 MFC set to  0.000000
3/26/2010	2:53:41 PM	BCl3 MFC set to  0.000000
3/26/2010	2:53:41 PM	SiCl4 MFC set to  0.000000
3/26/2010	2:53:41 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	2:53:41 PM	Tube furnace set to 0
3/26/2010	2:53:43 PM	Helium valve closed
3/26/2010	2:53:43 PM	H2 valve closed
3/26/2010	2:53:43 PM	BCl3 valve closed
3/26/2010	2:53:43 PM	PH3 valve closed
3/26/2010	2:53:43 PM	SiCl4 pre valve closed
3/26/2010	2:53:43 PM	SiCl4 post valve closed
3/26/2010	2:53:43 PM	Main Vac valve closed
3/26/2010	2:53:43 PM	Bubbler valve closed
3/26/2010	2:53:43 PM	Bypass valve opened
3/26/2010	2:53:43 PM	Helium MFC set to  0.000000
3/26/2010	2:53:43 PM	H2 MFC set to  0.000000
3/26/2010	2:53:43 PM	BCl3 MFC set to  0.000000
3/26/2010	2:53:43 PM	SiCl4 MFC set to  0.000000
3/26/2010	2:53:43 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	2:53:43 PM	Tube furnace set to 0
3/26/2010	2:54:06 PM	Helium valve closed
3/26/2010	2:54:06 PM	H2 valve closed
3/26/2010	2:54:06 PM	BCl3 valve closed
3/26/2010	2:54:06 PM	PH3 valve closed
3/26/2010	2:54:06 PM	SiCl4 pre valve closed
3/26/2010	2:54:06 PM	SiCl4 post valve closed
3/26/2010	2:54:06 PM	Bubbler valve closed
3/26/2010	2:54:06 PM	Main Vac valve opened
3/26/2010	2:54:06 PM	Bypass valve opened
3/26/2010	2:54:06 PM	Helium MFC set to  0.000000
3/26/2010	2:54:06 PM	H2 MFC set to  0.000000
3/26/2010	2:54:06 PM	BCl3 MFC set to  0.000000
3/26/2010	2:54:06 PM	SiCl4 MFC set to  0.000000
3/26/2010	2:54:06 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	2:54:06 PM	Tube furnace set to 0
3/26/2010	2:55:01 PM	Run aborted at 2:55 PM
3/26/2010	2:55:01 PM	Helium valve closed
3/26/2010	2:55:01 PM	H2 valve closed
3/26/2010	2:55:01 PM	BCl3 valve closed
3/26/2010	2:55:01 PM	PH3 valve closed
3/26/2010	2:55:01 PM	SiCl4 pre valve closed
3/26/2010	2:55:01 PM	SiCl4 post valve closed
3/26/2010	2:55:01 PM	Bypass valve closed
3/26/2010	2:55:01 PM	Main Vac valve closed
3/26/2010	2:55:01 PM	Bubbler valve closed
3/26/2010	2:55:01 PM	Helium MFC set to  0.000000
3/26/2010	2:55:01 PM	H2 MFC set to  0.000000
3/26/2010	2:55:01 PM	BCl3 MFC set to  0.000000
3/26/2010	2:55:01 PM	SiCl4 MFC set to  0.000000
3/26/2010	2:55:01 PM	Tube furnace set to 0
3/26/2010	2:55:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/26/2010	2:55:01 PM	Main Vac valve closed
3/26/2010	2:55:03 PM	Bypass valve closed
3/26/2010	2:55:04 PM	Main Vac valve opened
3/26/2010	2:55:05 PM	Bypass valve opened
3/26/2010	2:55:57 PM	Main Vac valve closed
3/26/2010	2:56:00 PM	Bypass valve closed
3/26/2010	2:56:08 PM	Bypass valve opened
3/26/2010	2:56:08 PM	Main Vac valve opened
3/26/2010	2:58:08 PM	Recipe started at 2:58 PM
3/26/2010	2:58:08 PM	Helium valve closed
3/26/2010	2:58:08 PM	BCl3 valve closed
3/26/2010	2:58:08 PM	PH3 valve closed
3/26/2010	2:58:08 PM	SiCl4 pre valve closed
3/26/2010	2:58:08 PM	SiCl4 post valve closed
3/26/2010	2:58:08 PM	Main Vac valve closed
3/26/2010	2:58:08 PM	Bypass valve closed
3/26/2010	2:58:08 PM	Bubbler valve closed
3/26/2010	2:58:08 PM	H2 valve opened
3/26/2010	2:58:08 PM	Helium MFC set to  0.000000
3/26/2010	2:58:08 PM	H2 MFC set to  500.000000
3/26/2010	2:58:08 PM	BCl3 MFC set to  0.000000
3/26/2010	2:58:08 PM	SiCl4 MFC set to  0.000000
3/26/2010	2:58:08 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	2:58:08 PM	Tube furnace set to 0
3/26/2010	2:59:26 PM	Helium valve closed
3/26/2010	2:59:26 PM	BCl3 valve closed
3/26/2010	2:59:26 PM	PH3 valve closed
3/26/2010	2:59:26 PM	SiCl4 pre valve closed
3/26/2010	2:59:26 PM	SiCl4 post valve closed
3/26/2010	2:59:26 PM	Main Vac valve closed
3/26/2010	2:59:26 PM	Bypass valve closed
3/26/2010	2:59:26 PM	H2 valve opened
3/26/2010	2:59:26 PM	Bubbler valve opened
3/26/2010	2:59:26 PM	Helium MFC set to  0.000000
3/26/2010	2:59:26 PM	H2 MFC set to  500.000000
3/26/2010	2:59:26 PM	BCl3 MFC set to  0.000000
3/26/2010	2:59:26 PM	SiCl4 MFC set to  0.000000
3/26/2010	2:59:26 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	2:59:26 PM	Tube furnace set to 0
3/26/2010	3:19:26 PM	Helium valve closed
3/26/2010	3:19:26 PM	BCl3 valve closed
3/26/2010	3:19:26 PM	PH3 valve closed
3/26/2010	3:19:26 PM	Main Vac valve closed
3/26/2010	3:19:26 PM	Bypass valve closed
3/26/2010	3:19:26 PM	H2 valve opened
3/26/2010	3:19:26 PM	SiCl4 pre valve opened
3/26/2010	3:19:26 PM	SiCl4 post valve opened
3/26/2010	3:19:26 PM	Bubbler valve opened
3/26/2010	3:19:26 PM	Helium MFC set to  0.000000
3/26/2010	3:19:26 PM	H2 MFC set to  500.000000
3/26/2010	3:19:26 PM	BCl3 MFC set to  0.000000
3/26/2010	3:19:26 PM	SiCl4 MFC set to  300.000000
3/26/2010	3:19:26 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	3:19:26 PM	Tube furnace set to 0
3/26/2010	3:39:26 PM	Helium valve closed
3/26/2010	3:39:26 PM	BCl3 valve closed
3/26/2010	3:39:26 PM	PH3 valve closed
3/26/2010	3:39:26 PM	SiCl4 pre valve closed
3/26/2010	3:39:26 PM	SiCl4 post valve closed
3/26/2010	3:39:26 PM	Main Vac valve closed
3/26/2010	3:39:26 PM	Bypass valve closed
3/26/2010	3:39:26 PM	H2 valve opened
3/26/2010	3:39:26 PM	Bubbler valve opened
3/26/2010	3:39:26 PM	Helium MFC set to  0.000000
3/26/2010	3:39:26 PM	H2 MFC set to  500.000000
3/26/2010	3:39:26 PM	BCl3 MFC set to  0.000000
3/26/2010	3:39:26 PM	SiCl4 MFC set to  0.000000
3/26/2010	3:39:26 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	3:39:26 PM	Tube furnace set to 0
3/26/2010	3:41:49 PM	H2 valve closed
3/26/2010	3:41:49 PM	BCl3 valve closed
3/26/2010	3:41:49 PM	PH3 valve closed
3/26/2010	3:41:49 PM	SiCl4 pre valve closed
3/26/2010	3:41:49 PM	SiCl4 post valve closed
3/26/2010	3:41:49 PM	Main Vac valve closed
3/26/2010	3:41:49 PM	Bypass valve closed
3/26/2010	3:41:49 PM	Helium valve opened
3/26/2010	3:41:49 PM	Bubbler valve opened
3/26/2010	3:41:49 PM	Helium MFC set to  500.000000
3/26/2010	3:41:49 PM	H2 MFC set to  0.000000
3/26/2010	3:41:49 PM	BCl3 MFC set to  0.000000
3/26/2010	3:41:49 PM	SiCl4 MFC set to  0.000000
3/26/2010	3:41:49 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	3:41:49 PM	Tube furnace set to 0
3/26/2010	3:41:51 PM	Helium valve closed
3/26/2010	3:41:51 PM	H2 valve closed
3/26/2010	3:41:51 PM	BCl3 valve closed
3/26/2010	3:41:51 PM	PH3 valve closed
3/26/2010	3:41:51 PM	SiCl4 pre valve closed
3/26/2010	3:41:51 PM	SiCl4 post valve closed
3/26/2010	3:41:51 PM	Main Vac valve closed
3/26/2010	3:41:51 PM	Bypass valve closed
3/26/2010	3:41:51 PM	Bubbler valve closed
3/26/2010	3:41:51 PM	Helium MFC set to  0.000000
3/26/2010	3:41:51 PM	H2 MFC set to  0.000000
3/26/2010	3:41:51 PM	BCl3 MFC set to  0.000000
3/26/2010	3:41:51 PM	SiCl4 MFC set to  0.000000
3/26/2010	3:41:51 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	3:41:51 PM	Tube furnace set to 0
3/26/2010	3:41:51 PM	Run finished at 3:41 PM
3/26/2010	3:42:05 PM	Helium MFC set to  500.000000
3/26/2010	3:42:05 PM	Helium valve opened
3/26/2010	3:42:07 PM	Bubbler valve opened
3/26/2010	3:56:30 PM	Bubbler valve closed
3/26/2010	3:56:31 PM	Helium valve closed
3/26/2010	3:56:34 PM	Helium MFC set to  0.000000
3/26/2010	3:58:39 PM	Program exited cleanly
3/26/2010	4:02:41 PM	Program started normally
3/26/2010	4:02:41 PM	Helium valve closed
3/26/2010	4:02:41 PM	H2 valve closed
3/26/2010	4:02:41 PM	BCl3 valve closed
3/26/2010	4:02:41 PM	PH3 valve closed
3/26/2010	4:02:41 PM	SiCl4 pre valve closed
3/26/2010	4:02:41 PM	SiCl4 post valve closed
3/26/2010	4:02:41 PM	Main Vac valve closed
3/26/2010	4:02:41 PM	Bypass valve closed
3/26/2010	4:02:41 PM	Bubbler valve closed
3/26/2010	4:02:41 PM	Helium MFC set to  0.000000
3/26/2010	4:02:41 PM	H2 MFC set to  0.000000
3/26/2010	4:02:41 PM	BCl3 MFC set to  0.000000
3/26/2010	4:02:41 PM	SiCl4 MFC set to  0.000000
3/26/2010	4:02:41 PM	Bypass solenoid MFC set to  760.000000
3/26/2010	4:02:41 PM	Tube furnace set to 0
3/26/2010	4:02:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/26/2010	4:02:43 PM	Recipe started at 4:02 PM
3/26/2010	4:02:43 PM	Helium valve closed
3/26/2010	4:02:43 PM	H2 valve closed
3/26/2010	4:02:43 PM	BCl3 valve closed
3/26/2010	4:02:43 PM	PH3 valve closed
3/26/2010	4:02:43 PM	SiCl4 pre valve closed
3/26/2010	4:02:43 PM	SiCl4 post valve closed
3/26/2010	4:02:43 PM	Main Vac valve closed
3/26/2010	4:02:43 PM	Bubbler valve closed
3/26/2010	4:02:43 PM	Bypass valve opened
3/26/2010	4:02:43 PM	Helium MFC set to  0.000000
3/26/2010	4:02:43 PM	H2 MFC set to  0.000000
3/26/2010	4:02:43 PM	BCl3 MFC set to  0.000000
3/26/2010	4:02:43 PM	SiCl4 MFC set to  0.000000
3/26/2010	4:02:43 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	4:02:43 PM	Tube furnace set to 0
3/26/2010	4:03:14 PM	Helium valve closed
3/26/2010	4:03:14 PM	H2 valve closed
3/26/2010	4:03:14 PM	BCl3 valve closed
3/26/2010	4:03:14 PM	PH3 valve closed
3/26/2010	4:03:14 PM	SiCl4 pre valve closed
3/26/2010	4:03:14 PM	SiCl4 post valve closed
3/26/2010	4:03:14 PM	Bubbler valve closed
3/26/2010	4:03:14 PM	Main Vac valve opened
3/26/2010	4:03:14 PM	Bypass valve opened
3/26/2010	4:03:15 PM	Helium MFC set to  0.000000
3/26/2010	4:03:15 PM	H2 MFC set to  0.000000
3/26/2010	4:03:15 PM	BCl3 MFC set to  0.000000
3/26/2010	4:03:15 PM	SiCl4 MFC set to  0.000000
3/26/2010	4:03:15 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	4:03:15 PM	Tube furnace set to 0
3/26/2010	4:03:15 PM	Run finished at 4:03 PM
3/26/2010	4:03:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/26/2010	4:05:13 PM	Program exited cleanly
3/26/2010	4:34:24 PM	Program started normally
3/26/2010	4:34:24 PM	Helium valve closed
3/26/2010	4:34:24 PM	H2 valve closed
3/26/2010	4:34:24 PM	BCl3 valve closed
3/26/2010	4:34:24 PM	PH3 valve closed
3/26/2010	4:34:24 PM	SiCl4 pre valve closed
3/26/2010	4:34:24 PM	SiCl4 post valve closed
3/26/2010	4:34:24 PM	Main Vac valve closed
3/26/2010	4:34:24 PM	Bypass valve closed
3/26/2010	4:34:24 PM	Bubbler valve closed
3/26/2010	4:34:24 PM	Helium MFC set to  0.000000
3/26/2010	4:34:24 PM	H2 MFC set to  0.000000
3/26/2010	4:34:24 PM	BCl3 MFC set to  0.000000
3/26/2010	4:34:24 PM	SiCl4 MFC set to  0.000000
3/26/2010	4:34:24 PM	Bypass solenoid MFC set to  760.000000
3/26/2010	4:34:24 PM	Tube furnace set to 0
3/26/2010	4:34:35 PM	Bypass valve opened
3/26/2010	4:34:35 PM	Main Vac valve opened
3/26/2010	4:34:52 PM	Tube furnace set to 100
3/26/2010	4:34:57 PM	Tube furnace set to 1000
3/26/2010	4:35:03 PM	Tube furnace set to 475
3/26/2010	4:35:08 PM	Tube furnace set to 2
3/26/2010	4:35:12 PM	Tube furnace set to 31
3/26/2010	4:54:32 PM	Program started after a nonstandard shutdown
3/26/2010	4:54:32 PM	Helium valve closed
3/26/2010	4:54:32 PM	H2 valve closed
3/26/2010	4:54:32 PM	BCl3 valve closed
3/26/2010	4:54:32 PM	PH3 valve closed
3/26/2010	4:54:32 PM	SiCl4 pre valve closed
3/26/2010	4:54:32 PM	SiCl4 post valve closed
3/26/2010	4:54:32 PM	Main Vac valve closed
3/26/2010	4:54:32 PM	Bypass valve closed
3/26/2010	4:54:32 PM	Bubbler valve closed
3/26/2010	4:54:32 PM	Helium MFC set to  0.000000
3/26/2010	4:54:32 PM	H2 MFC set to  0.000000
3/26/2010	4:54:32 PM	BCl3 MFC set to  0.000000
3/26/2010	4:54:32 PM	SiCl4 MFC set to  0.000000
3/26/2010	4:54:32 PM	Bypass solenoid MFC set to  760.000000
3/26/2010	4:54:37 PM	Error in setting the tube furnace  to 0
3/26/2010	4:54:42 PM	Bypass valve opened
3/26/2010	4:54:42 PM	Main Vac valve opened
3/26/2010	4:54:42 PM	Bypass valve closed
3/26/2010	4:54:42 PM	Bypass valve opened
3/26/2010	4:54:42 PM	Bypass valve closed
3/26/2010	4:54:42 PM	Bypass valve opened
3/26/2010	4:54:42 PM	Bypass valve closed
3/26/2010	4:54:42 PM	Bypass valve opened
3/26/2010	4:55:19 PM	Program exited cleanly
3/26/2010	4:55:29 PM	Program started normally
3/26/2010	4:55:29 PM	Helium valve closed
3/26/2010	4:55:29 PM	H2 valve closed
3/26/2010	4:55:29 PM	BCl3 valve closed
3/26/2010	4:55:29 PM	PH3 valve closed
3/26/2010	4:55:29 PM	SiCl4 pre valve closed
3/26/2010	4:55:29 PM	SiCl4 post valve closed
3/26/2010	4:55:29 PM	Main Vac valve closed
3/26/2010	4:55:29 PM	Bypass valve closed
3/26/2010	4:55:29 PM	Bubbler valve closed
3/26/2010	4:55:29 PM	Helium MFC set to  0.000000
3/26/2010	4:55:29 PM	H2 MFC set to  0.000000
3/26/2010	4:55:29 PM	BCl3 MFC set to  0.000000
3/26/2010	4:55:29 PM	SiCl4 MFC set to  0.000000
3/26/2010	4:55:29 PM	Bypass solenoid MFC set to  760.000000
3/26/2010	4:55:30 PM	Tube furnace set to 0
3/26/2010	4:55:31 PM	Bypass valve opened
3/26/2010	4:55:32 PM	Main Vac valve opened
3/26/2010	4:55:48 PM	Program exited cleanly
3/26/2010	4:56:00 PM	Program started normally
3/26/2010	4:56:00 PM	Helium valve closed
3/26/2010	4:56:00 PM	H2 valve closed
3/26/2010	4:56:00 PM	BCl3 valve closed
3/26/2010	4:56:00 PM	PH3 valve closed
3/26/2010	4:56:00 PM	SiCl4 pre valve closed
3/26/2010	4:56:00 PM	SiCl4 post valve closed
3/26/2010	4:56:00 PM	Main Vac valve closed
3/26/2010	4:56:00 PM	Bypass valve closed
3/26/2010	4:56:00 PM	Bubbler valve closed
3/26/2010	4:56:00 PM	Helium MFC set to  0.000000
3/26/2010	4:56:00 PM	H2 MFC set to  0.000000
3/26/2010	4:56:00 PM	BCl3 MFC set to  0.000000
3/26/2010	4:56:00 PM	SiCl4 MFC set to  0.000000
3/26/2010	4:56:00 PM	Bypass solenoid MFC set to  760.000000
3/26/2010	4:56:00 PM	Tube furnace set to 0
3/26/2010	4:56:02 PM	Bypass valve opened
3/26/2010	4:56:03 PM	Main Vac valve opened
3/26/2010	4:56:09 PM	Tube furnace set to 100
3/26/2010	4:56:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/26/2010	4:56:25 PM	Recipe started at 4:56 PM
3/26/2010	4:56:25 PM	H2 valve closed
3/26/2010	4:56:25 PM	BCl3 valve closed
3/26/2010	4:56:25 PM	PH3 valve closed
3/26/2010	4:56:25 PM	SiCl4 pre valve closed
3/26/2010	4:56:25 PM	SiCl4 post valve closed
3/26/2010	4:56:25 PM	Main Vac valve closed
3/26/2010	4:56:25 PM	Bypass valve closed
3/26/2010	4:56:25 PM	Bubbler valve closed
3/26/2010	4:56:25 PM	Helium valve opened
3/26/2010	4:56:25 PM	Helium MFC set to  500.000000
3/26/2010	4:56:25 PM	H2 MFC set to  0.000000
3/26/2010	4:56:25 PM	BCl3 MFC set to  0.000000
3/26/2010	4:56:25 PM	SiCl4 MFC set to  0.000000
3/26/2010	4:56:25 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	4:56:25 PM	Tube furnace set to 0
3/26/2010	4:57:40 PM	Helium valve closed
3/26/2010	4:57:40 PM	H2 valve closed
3/26/2010	4:57:40 PM	BCl3 valve closed
3/26/2010	4:57:40 PM	PH3 valve closed
3/26/2010	4:57:40 PM	SiCl4 pre valve closed
3/26/2010	4:57:40 PM	SiCl4 post valve closed
3/26/2010	4:57:40 PM	Main Vac valve closed
3/26/2010	4:57:40 PM	Bypass valve closed
3/26/2010	4:57:40 PM	Bubbler valve closed
3/26/2010	4:57:40 PM	Helium MFC set to  0.000000
3/26/2010	4:57:40 PM	H2 MFC set to  0.000000
3/26/2010	4:57:40 PM	BCl3 MFC set to  0.000000
3/26/2010	4:57:40 PM	SiCl4 MFC set to  0.000000
3/26/2010	4:57:40 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	4:57:40 PM	Tube furnace set to 0
3/26/2010	4:57:41 PM	Run finished at 4:57 PM
3/26/2010	4:57:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/26/2010	4:58:09 PM	Program exited cleanly
3/26/2010	6:47:36 PM	Program started normally
3/26/2010	6:47:36 PM	Helium valve closed
3/26/2010	6:47:36 PM	H2 valve closed
3/26/2010	6:47:36 PM	BCl3 valve closed
3/26/2010	6:47:36 PM	PH3 valve closed
3/26/2010	6:47:36 PM	SiCl4 pre valve closed
3/26/2010	6:47:36 PM	SiCl4 post valve closed
3/26/2010	6:47:36 PM	Main Vac valve closed
3/26/2010	6:47:36 PM	Bypass valve closed
3/26/2010	6:47:36 PM	Bubbler valve closed
3/26/2010	6:47:36 PM	Helium MFC set to  0.000000
3/26/2010	6:47:36 PM	H2 MFC set to  0.000000
3/26/2010	6:47:36 PM	BCl3 MFC set to  0.000000
3/26/2010	6:47:36 PM	SiCl4 MFC set to  0.000000
3/26/2010	6:47:36 PM	Bypass solenoid MFC set to  760.000000
3/26/2010	6:47:37 PM	Tube furnace set to 0
3/26/2010	6:47:48 PM	Tube furnace set to 27
3/26/2010	6:48:08 PM	Tube furnace set to 13
3/26/2010	6:48:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/26/2010	6:48:13 PM	Recipe started at 6:48 PM
3/26/2010	6:48:13 PM	Helium valve closed
3/26/2010	6:48:13 PM	H2 valve closed
3/26/2010	6:48:13 PM	BCl3 valve closed
3/26/2010	6:48:13 PM	PH3 valve closed
3/26/2010	6:48:13 PM	SiCl4 pre valve closed
3/26/2010	6:48:13 PM	SiCl4 post valve closed
3/26/2010	6:48:13 PM	Main Vac valve closed
3/26/2010	6:48:13 PM	Bubbler valve closed
3/26/2010	6:48:13 PM	Bypass valve opened
3/26/2010	6:48:13 PM	Helium MFC set to  0.000000
3/26/2010	6:48:13 PM	H2 MFC set to  0.000000
3/26/2010	6:48:13 PM	BCl3 MFC set to  0.000000
3/26/2010	6:48:13 PM	SiCl4 MFC set to  0.000000
3/26/2010	6:48:13 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	6:48:13 PM	Tube furnace set to 0
3/26/2010	6:48:47 PM	Helium valve closed
3/26/2010	6:48:47 PM	H2 valve closed
3/26/2010	6:48:47 PM	BCl3 valve closed
3/26/2010	6:48:47 PM	PH3 valve closed
3/26/2010	6:48:47 PM	SiCl4 pre valve closed
3/26/2010	6:48:47 PM	SiCl4 post valve closed
3/26/2010	6:48:47 PM	Bubbler valve closed
3/26/2010	6:48:47 PM	Main Vac valve opened
3/26/2010	6:48:47 PM	Bypass valve opened
3/26/2010	6:48:47 PM	Helium MFC set to  0.000000
3/26/2010	6:48:47 PM	H2 MFC set to  0.000000
3/26/2010	6:48:47 PM	BCl3 MFC set to  0.000000
3/26/2010	6:48:47 PM	SiCl4 MFC set to  0.000000
3/26/2010	6:48:47 PM	Bypass solenoid MFC set to  0.000000
3/26/2010	6:48:47 PM	Tube furnace set to 0
3/26/2010	6:48:47 PM	Run finished at 6:48 PM
3/26/2010	6:48:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
